Tantalum carbide-graphite composite film synthesized by hot-filament chemical vapor deposition

Pure and Applied Chemistry

Volumn 84, Issue 12, 2012, Pages 2499-2506

  Ali, Mubarak ^a   Ürgen, Mustafa ^b  

^a COMSATS Institute of Information Technology ^*  (Pakistan)

^b ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Chemical vapor deposition; Composite materials; Crystal structures; Interfaces; Materials science

Indexed keywords

CARBIDES; COMPOSITE FILMS; COMPOSITE MATERIALS; CRYSTAL STRUCTURE; DEPOSITION; GRAPHITE; INTERFACES (MATERIALS); MATERIALS SCIENCE; METHANATION; METHANE; SUBSTRATES; SURFACE ROUGHNESS; TANTALUM; TANTALUM CARBIDE; THERMAL EVAPORATION; VAPOR DEPOSITION; X RAY DIFFRACTION;

CHAMBER PRESSURE; CHEMICAL VAPOR DEPOSITIONS (CVD); DENSE STRUCTURES; GRAPHITE COMPOSITES; GRAPHITE DEPOSITS; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; METHANE CONCENTRATIONS; SUBSTRATE TEMPERATURE;

CHEMICAL VAPOR DEPOSITION;

EID: 84870524991     PISSN: 00334545     EISSN: 13653075     Source Type: Journal    
DOI: 10.1351/PAC-CON-11-12-01     Document Type: Article

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