A study on the flexibility of the hot-filament configuration and its implementation for diamond, boron carbide and ternary alloys deposition

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2733-2740

  Soto, G ^a   Silva, G ^b   Contreras, O ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^b UNIVERSIDAD AUTÓNOMA DE BAJA CALIFORNIA   (Mexico)

Author keywords

Boron carbide; CVD; Diamond; Hot filament; PVD; Rhombohedral boron; Tantalum boride; Tantalum boron carbide; Tantalum carbide

Indexed keywords

BORON CARBIDE; DIAMOND FILMS; FILM GROWTH; SUBLIMATION; TANTALUM COMPOUNDS;

FILAMENT SUBLIMATION; HOT FILAMENT-CHEMICAL VAPOR DEPOSITION; HOT FILAMENT-PHYSICAL VAPOR DEPOSITION; RHOMBOHEDRAL BORON;

CHEMICAL VAPOR DEPOSITION;

BORON CARBIDE; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; FILM GROWTH; SUBLIMATION; TANTALUM COMPOUNDS;

EID: 33751305216     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.05.014     Document Type: Article

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