TiC and TaC deposition by pulsed laser ablation: A comparative approach

Applied Surface Science

Volumn 173, Issue 3-4, 2001, Pages 233-241

  Teghil, R ^a   D'Alessio, L ^a   Zaccagnino, M ^a   Ferro, D ^b   Marotta, V ^b   De Maria, G ^c  

^a UNIVERSITY OF BASILICATA   (Italy)

^b CNR   (Italy)

^c SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LASER ABLATION; MORPHOLOGY; NEODYMIUM LASERS; PULSED LASER APPLICATIONS; SILICON; SUBSTRATES; SURFACE STRUCTURE; TANTALUM CARBIDE; TITANIUM CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER FLUENCE;

SURFACE TREATMENT;

EID: 0034830433     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00900-4     Document Type: Article

References (21)

1. G. Georgeiev, N. Fescheschiev, D. Popov, Z. Uzuuov, Vacuum 36 (1986) 595.
2. P.K. Ashwini, V. Kumar, J. Sarkar, J. Vac. Sci. Technol. A 7 (1989) 1488.
3. J. Veligdan, D. Branch, P.E. Vanier, R.E. Barletta, Mater. Res. Soc. Symp. Proc. 285 (1983) 320.
4. D.B. Chrysey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
5. J.C. Miller, R.F. Haglund (Eds.), Laser Ablation and Desorption, Academic Press, New York, 1998.
6. R. Teghil, L. D'Alessio, G. De Maria, D. Ferro, Appl. Surf. Sci. 86 (1995) 190.
7. L. D'Alessio, A.M. Salvi, R. Teghil, V. Marotta, A. Santagata, B. Brunetti, D. Ferro, G. De Maria, Appl. Surf. Sci. 134 (1998) 53.
8. A. Giardini Guidoni, A. Mele, T.M. Di Palma, C. Flamini, S. Orlando, R. Teghil, Thin Solid Films 295 (1997) 77.
9. R. Teghil, V. Marotta, T.M. Di Palma, Surf. Coat. Tech. 100/ 101 (1998) 433.
10. H.O. Sankur, J. De Natale, W. Gunning, J.G. Nelson, J. Vacuum Sci. Technol. A 5 (5) (1987) 2869.
11. C.N. Afonso, J. Gonzales, Nucl. Instr. Meth. B 116 (1996) 404.
12. R. Teghil, A. Giardini Guidoni, A. Mele, S. Piccirillo, M. Coreno, V. Marotta, T.M. Di Palma, Surf. Interf. Anal. 22 (1994) 181.
13. A. Santagata, V. Marotta, L. D'Alessio, R. Teghil, D. Ferro, G. De Maria, Appl. Surf. Sci. 109/110 (1997) 376.
14. A. Mele, A. Giardini Guidoni, R. Kelly, A. Miotello, S. Orlando, R. Teghil, C. Flamini, Nucl. Instr. Meth. B 116 (1996) 257.
15. A. Krajewski, L. D'Alessio, G. De Maria, Cryst. Res. Technol. 33 (1998) 341.
16. G. De Maria, L. D'Alessio, D. Ferro, R. Teghil, in: ICCE/5, Proceedings of the Fifth International Conference on Composite Engineering, Las Vegas, USA, July 5-11, 1998, p. 225.
17. G. De Maria, in: M.A.V. Ribeiro da Silva (Ed.), Thermochemistry and its Applications to Chemical and Biochemical Systems, Reidel, Dordrecht, 1984, p. 157.
18. H. Sankur, T.I. Cheung, Appl. Phys. A 47 (1988) 271.
19. R.C. Weast, M.I. Astle (Eds.), CRC Handbook on Chemistry and Physics, 69th Edition, CRC Press, Boca Raton, 1989.
20. M.L. Hammond, Solid State Technol. 21 (11) (1978) 68.
21. K.K. Schuegraf, Handbook of Thin Film Deposition Processes and Techniques, Noyes Publishers, Park Ridge, 1988.