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Volumn 264, Issue , 2013, Pages 184-190

Effect of post annealing on structural, optical and dielectric properties of MgTiO 3 thin films deposited by RF magnetron sputtering

Author keywords

Dielectric properties; MTO thin films; Optical properties; RF magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; ANNEALING; DIELECTRIC PROPERTIES; DIELECTRIC PROPERTIES OF SOLIDS; ENERGY GAP; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; METAL ANALYSIS; OPTICAL PROPERTIES; OXYGEN VACANCIES; REFRACTIVE INDEX; THIN FILMS; TITANIUM COMPOUNDS; X RAY DIFFRACTION;

EID: 84870524422     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.09.168     Document Type: Article
Times cited : (42)

References (34)
  • 1
    • 9644302859 scopus 로고    scopus 로고
    • Microwave dielectric properties of magnesium calcium titanate thin films
    • B.D. Lee, H.R. Lee, K.H. Yoon, and Y.S. Cho Microwave dielectric properties of magnesium calcium titanate thin films Ceram. Int. 31 2005 143 146
    • (2005) Ceram. Int. , vol.31 , pp. 143-146
    • Lee, B.D.1    Lee, H.R.2    Yoon, K.H.3    Cho, Y.S.4
  • 3
    • 33646895468 scopus 로고    scopus 로고
    • Mn, Mg, and Zn ilmenite group titanates: A reconnaissance Rietveld study
    • R.P. Liferovich, and R.H. Mitchel Mn, Mg, and Zn ilmenite group titanates: a reconnaissance Rietveld study Crystallogr. Rep. 51 2006 417 424
    • (2006) Crystallogr. Rep. , vol.51 , pp. 417-424
    • Liferovich, R.P.1    Mitchel, R.H.2
  • 5
    • 84963159842 scopus 로고
    • Recent development of dielectric resonator materials and filters in Japan
    • K. Walkino Recent development of dielectric resonator materials and filters in Japan Ferroelectrics 91 1989 69 86
    • (1989) Ferroelectrics , vol.91 , pp. 69-86
    • Walkino, K.1
  • 6
    • 0030166030 scopus 로고    scopus 로고
    • Role of niobium in magnesium titanate microwave dielectric ceramics
    • V.M. Ferreira, and J.L. Baptista Role of niobium in magnesium titanate microwave dielectric ceramics J. Am. Ceram. Soc. 79 1996 1697 1698
    • (1996) J. Am. Ceram. Soc. , vol.79 , pp. 1697-1698
    • Ferreira, V.M.1    Baptista, J.L.2
  • 7
    • 0024019237 scopus 로고
    • 3 : Recent developments in devices for telecommunications
    • 3 : recent developments in devices for telecommunications J. Lightwave Technol. 6 1988 847 861
    • (1988) J. Lightwave Technol. , vol.6 , pp. 847-861
    • Thylen, L.1
  • 9
    • 0032641356 scopus 로고    scopus 로고
    • 2 thin films on Si by MOCVD using a mode converting type of microwave plasma apparatus
    • 2 thin films on Si by MOCVD using a mode converting type of microwave plasma apparatus Thin Solid Films 341 1999 132 135
    • (1999) Thin Solid Films , vol.341 , pp. 132-135
    • Komatsu, Y.1    Sato, T.2    Ito, S.3    Akadi, K.4
  • 11
    • 0343462251 scopus 로고    scopus 로고
    • 3 thin films prepared by metalorganic solution deposition and their properties
    • 3 thin films prepared by metalorganic solution deposition and their properties Thin Solid Films 385 2001 43 47
    • (2001) Thin Solid Films , vol.385 , pp. 43-47
    • Choi, Y.H.1    Lee, J.2
  • 13
    • 44449146929 scopus 로고    scopus 로고
    • Synthesis of tetragonal flake-like magnesium titanate nanocrystallites
    • H. Kanga, L. Wanga, D. Xuea, K. Lia, and C. Liua Synthesis of tetragonal flake-like magnesium titanate nanocrystallites J. Alloys Compd. 460 2008 160 163
    • (2008) J. Alloys Compd. , vol.460 , pp. 160-163
    • Kanga, H.1    Wanga, L.2    Xuea, D.3    Lia, K.4    Liua, C.5
  • 14
    • 0032073549 scopus 로고    scopus 로고
    • Preparation of magnesium-calcium titanate powders by alkoxide precursor method
    • R. Piagai, I. Kim, J.G. Park, and Y.H. Kim Preparation of magnesium-calcium titanate powders by alkoxide precursor method J. Am. Ceram. Soc. 81 1998 1361 1364
    • (1998) J. Am. Ceram. Soc. , vol.81 , pp. 1361-1364
    • Piagai, R.1    Kim, I.2    Park, J.G.3    Kim, Y.H.4
  • 15
    • 77954217558 scopus 로고    scopus 로고
    • Synthesis of nanocrystalline magnesium titanate by an auto-igniting combustion technique and its structural, spectroscopic and dielectric properties
    • K. Suresh, J.K. Thomas, H. Sreemoolanadhan, C.N. George, A. John, S. Solomon, P.R.S. Wariar, and J. Koshy Synthesis of nanocrystalline magnesium titanate by an auto-igniting combustion technique and its structural, spectroscopic and dielectric properties Mater. Res. Bull. 45 2010 761 765
    • (2010) Mater. Res. Bull. , vol.45 , pp. 761-765
    • Suresh, K.1    Thomas, J.K.2    Sreemoolanadhan, H.3    George, C.N.4    John, A.5    Solomon, S.6    Wariar, P.R.S.7    Koshy, J.8
  • 16
    • 10244221093 scopus 로고    scopus 로고
    • 3 thin films deposited by RF magnetron sputtering
    • 3 thin films deposited by RF magnetron sputtering J. Vac. Sci. Technol. A 22 2004 2440 2450
    • (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 2440-2450
    • Huang, C.L.1    Pan, C.L.2
  • 20
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanpoel Determination of the thickness and optical constants of amorphous silicon J. Phys. E: Sci. Instrum. 16 1983 1214 1222
    • (1983) J. Phys. E: Sci. Instrum. , vol.16 , pp. 1214-1222
    • Swanpoel, R.1
  • 21
    • 0009968458 scopus 로고
    • Inhomogeneous and co-evaporated homogeneous films for optical applications
    • R. Jacobson Inhomogeneous and co-evaporated homogeneous films for optical applications Phys. Thin films 8 1975 51 98
    • (1975) Phys. Thin Films , vol.8 , pp. 51-98
    • Jacobson, R.1
  • 22
    • 33845197585 scopus 로고    scopus 로고
    • 2 thin films deposited by RF magnetron sputtering
    • 2 thin films deposited by RF magnetron sputtering Vacuum 81 2007 627 631
    • (2007) Vacuum , vol.81 , pp. 627-631
    • Ye, Q.1    Liu, P.Y.2    Tang, Z.F.3    Zhai, L.4
  • 23
    • 0002211129 scopus 로고
    • A profile refinement method for nuclear and magnetic structures
    • H.M. Rietveld A profile refinement method for nuclear and magnetic structures J. Appl. Crystallogr. 2 1969 65 71
    • (1969) J. Appl. Crystallogr. , vol.2 , pp. 65-71
    • Rietveld, H.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.