To mitigate airborne molecular contamination through ultra-pure air system

Building and Environment

Volumn 59, Issue , 2013, Pages 153-163

  Chuang, Tzu Sou ^a   Chang, Luh Maan ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Airborne molecular contamination; AMC; Immersing photochemical oxidation; Ultra pure air; UPA

Indexed keywords

AIR COMPRESSION; AIR QUALITY LEVELS; AIR SYSTEMS; AIRBORNE MOLECULAR CONTAMINATION; AMC; COLLISION PROBABILITY; CONDENSATION PROCESS; DETECTION LIMITS; MANUFACTURING FACILITY; PHOTOCHEMICAL OXIDATION; POST TREATMENT; POST-TREATMENT PROCESS; PRE-TREATMENT; UPA; WATER DROPLETS;

AEROSOLS; AIR QUALITY; HUMIDITY CONTROL; HYDROPHILICITY; IMPURITIES; VOLATILE ORGANIC COMPOUNDS;

CONTAMINATION;

AEROSOL; AIR QUALITY; INDOOR AIR; PHOTOOXIDATION; VOLATILE ORGANIC COMPOUND; EXPERIMENTAL STUDY; NANOTECHNOLOGY; PHOTOCHEMISTRY; REACTION KINETICS; TECHNOLOGICAL DEVELOPMENT; VENTILATION;

EID: 84870409198     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2012.08.016     Document Type: Article

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