Silicon-on-insulator based ZnO nanowire photodetector

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 6, 2012, Pages

  Xie, Yong ^a,b   Madel, Manfred ^b   Neuschl, Benjamin ^b   Jie, Wanqi ^a   Röder, Uwe ^b   Feneberg, Martin ^b,c   Thonke, Klaus ^b  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b UNIVERSITY OF ULM   (Germany)

^c OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS PROCESSS; CRYSTALLINE QUALITY; ETCHING PROCESS; HIGH TEMPERATURE PROCESS; MICROTRENCHES; MULTIPLE SENSORS; PHOTO SENSITIVE DETECTORS; SENSING APPLICATIONS; SILICON ON INSULATOR; SILICON-ON-INSULATOR SUBSTRATES; SOLAR-BLIND; STANDARD PHOTOLITHOGRAPHY; ZNO; ZNO NANOWIRES;

CMOS INTEGRATED CIRCUITS; NANOWIRES; PHOTOLITHOGRAPHY;

ZINC OXIDE;

EID: 84870358261     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4759261     Document Type: Article

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