Three-dimensional fuzzy influence analysis of fitting algorithms on integrated chip topographic modeling

Journal of Mechanical Science and Technology

Volumn 26, Issue 10, 2012, Pages 3177-3191

  Liang, Zhongwei ^a   Ye, Bangyan ^b   Wang, Yijun ^a   Brauwer, Richard Kars ^c  

^a GUANGZHOU UNIVERSITY   (China)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^c INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

Integrated chip surface; Micro topography; Performance influence; Surface fitting algorithm; Three dimensional fuzzy analysis

Indexed keywords

CHIP SURFACES; DATA SEQUENCES; FITTING ALGORITHMS; FUZZY ANALYSIS; FUZZY EVALUATING; INFLUENCE ANALYSIS; INFLUENCE MECHANISM; MATHEMATICAL RELATION; MICRO TOPOGRAPHY; MICRO-MODELING; MODELING PROCESS; PARAMETER CONDITIONS; PERFORMANCE INFLUENCE; PHYSICAL CONTROL; POINT CLOUD; QUANTITATIVE EVALUATING; SPATIAL COORDINATES; SPATIAL FEATURES; SPATIAL MODELING; SURFACE MODELS; SURFACE PRECISION; TOPOGRAPHIC FEATURES;

ALGORITHMS; INTEGRATION; MODELS; PARAMETER ESTIMATION; SURFACE TOPOGRAPHY;

THREE DIMENSIONAL;

EID: 84870288920     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12206-012-0832-6     Document Type: Article

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