Defect detection of IC wafer based on two-dimension wavelet transform

Microelectronics Journal

Volumn 41, Issue 2-3, 2010, Pages 171-177

  Liu, Hongxia ^a   Zhou, Wen ^a   Kuang, Qianwei ^a   Cao, Lei ^a   Gao, Bo ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

Defect detection; Integrated circuit (IC) wafer; Two dimension wavelet transform

Indexed keywords

ALGORITHM COMPLEXITY; DEFECT DETECTION; DEFECT IMAGES; DEFECTS DETECTION; DETECTION METHODS; HIGH ROBUSTNESS; IC DEFECT DETECTION; IC WAFERS; IMAGE GRAYS; MATCHING TECHNOLOGY; STANDARD IMAGES; TWO-DIMENSION; TWO-DIMENSION WAVELET TRANSFORM;

COMPUTATIONAL COMPLEXITY; DISCRETE WAVELET TRANSFORMS; FEATURE EXTRACTION; IMAGE PROCESSING; INTEGRATED CIRCUITS; STANDARDS;

DEFECTS;

EID: 77649181799     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2010.01.015     Document Type: Article

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