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Volumn 552, Issue , 2013, Pages 131-136
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Comparison of thin film properties and selenization behavior of CuGaIn precursors prepared by co-evaporation and co-sputtering
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Author keywords
Co evaporation; Co sputtering; High temperature XRD; Sputter selenization
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Indexed keywords
COPPER;
EVAPORATION;
FILM PREPARATION;
GALLIUM;
RAPID THERMAL ANNEALING;
SEMICONDUCTING SELENIUM COMPOUNDS;
SPUTTERING;
CO-EVAPORATIONS;
COSPUTTERING;
FEATURE DIFFERENCES;
HIGH-TEMPERATURE XRD;
SELENIZATION;
SELENIZATION PROCESS;
SPUTTERED PRECURSORS;
THIN-FILM PROPERTIES;
THIN FILMS;
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EID: 84869877461
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2012.10.039 Document Type: Article |
Times cited : (22)
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References (14)
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