Multi-layer metallic composites as strong electrode structures for MEMS

12th International Conference on Fracture 2009, ICF-12

Volumn 6, Issue , 2009, Pages 4688-4695

  Bahr, D F ^a   Bellou, A ^a   Overman, N ^a   Zbib, H M ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE STRUCTURE; FILM PERFORMANCE; LARGE STRAINS; METALLIC COMPOSITES; MICROMECHANICAL SYSTEMS; MULTI-LAYERED FILMS; PIEZOELECTRIC FILM; SUSPENDED MEMBRANES; TESTING METHODOLOGY;

ELECTRODES; FRACTURE; MECHANICAL TESTING; MULTILAYER FILMS; PIEZOELECTRICITY;

METALS;

EID: 84869853248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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