Material characterisation at the micro scale through on-chip tests

11th International Conference on Fracture 2005, ICF11

Volumn 5, Issue , 2005, Pages 3795-3799

  Cacchione, Fabrizio ^a   De Masi, Biagio ^b   Corigliano, Alberto ^a   Ferrera, Marco ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

FRACTURE CHARACTERIZATION; GRAIN MORPHOLOGIES; LOADING CONDITION; MATERIAL CHARACTERISATION; MECHANICAL RESPONSE; MICRO-SCALES; ON CHIPS; PARALLEL PLATE CAPACITORS; PARALLEL-PLATE ACTUATORS; POLYSILICON FILMS; RUPTURE STRENGTH; SHEAR ELASTIC MODULUS; TEST STRUCTURE; YOUNG MODULUS;

CAPACITORS; FRACTURE; POLYSILICON;

LOADING;

EID: 84869839255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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