CMOS-compatible Tungsten heaters for silicon photonic waveguides

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2012, Pages 234-236

  Masood, A ^a   Pantouvaki, M ^b   Goossens, D ^b   Lepage, G ^b   Verheyen, P ^b   Van Thourhout, D ^a   Absil, P ^b   Bogaerts, W ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

CMOS; Integration; Silicon photonics; thermo optic tuning

Indexed keywords

CMOS; CMOS COMPATIBLE; FABRICATION PROCESS; HEATING TIME; RING RESONATOR; SILICON PHOTONICS; STANDARD CMOS; THERMOOPTIC TUNING; THERMOOPTICS;

INTEGRATION; PHOTONIC DEVICES; TUNGSTEN;

PHOTONICS;

EID: 84869158413     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/GROUP4.2012.6324144     Document Type: Conference Paper

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