Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Optics Letters

Volumn 35, Issue 7, 2010, Pages 1013-1015

  Van Campenhout, Joris ^a   Green, William M J ^a   Assefa, Solomon ^a   Vlasov, Yurii A ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER UTILIZATION; MEMS; METALS; MOS DEVICES; OXIDE SEMICONDUCTORS; PHASE SHIFT; SEMICONDUCTING SILICON; SILICON; WAVEGUIDES;

CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; INTRINSIC PROPERTY; SILICIDATION PROCESS; SILICON RIB WAVEGUIDES; SILICON WAVEGUIDE; SUBMICROMETERS; THERMO-OPTIC PHASE SHIFTERS;

CMOS INTEGRATED CIRCUITS;

EID: 77954950698     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.35.001013     Document Type: Article

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