Crystalline silicon cells fabricated by different preclean processes

Japanese Journal of Applied Physics

Volumn 51, Issue 10 PART 2, 2012, Pages

  Chen, Shih Wei ^a   Chen, Sung Yu ^a   Chen, Chien Hsun ^a   Cai, Bing Lun ^b   Wu, Chien Hung ^b   Du, Chen Hsun ^a   Lu, Wen Haw ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b CHUNG HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CELL EFFICIENCY; CRYSTALLINE SILICON CELLS; GETTERING PROCESS; LIFETIME MEASUREMENTS; MINORITY CARRIER LIFETIMES; NAOH SOLUTIONS; PRE-CLEAN PROCESS; SILICON SUBSTRATES; SURFACE CONDITIONS; WAVELENGTH RANGES;

PHYSICAL PROPERTIES; PHYSICS;

LITHOGRAPHY;

EID: 84869116708     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.10NA11     Document Type: Article

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