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Volumn 358, Issue 23, 2012, Pages 3137-3140
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Transparent conducting Sb-doped SnO 2 thin films grown by pulsed laser deposition
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Author keywords
Antimony doped tin oxide (ATO); Optoelectronic characteristics; Pulsed laser deposition; Thin films; Transparent conducting oxides
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Indexed keywords
ANTIMONY-DOPED TIN OXIDE;
ELECTRICAL RESISTIVITY;
OPTIMIZED DEPOSITION CONDITIONS;
OPTOELECTRONIC CHARACTERISTICS;
OXYGEN PARTIAL PRESSURE;
PROCESS PARAMETERS;
QUARTZ GLASS SUBSTRATES;
SB-DOPED SNO;
SUBSTRATE TEMPERATURE;
TRANSPARENT CONDUCTING OXIDE;
VISIBLE REGION;
CONDUCTIVE FILMS;
ELECTRIC CONDUCTIVITY;
LASERS;
PULSED LASER DEPOSITION;
QUARTZ;
SEMICONDUCTOR DOPING;
SUBSTRATES;
TIN;
TIN OXIDES;
THIN FILMS;
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EID: 84869077104
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2012.09.009 Document Type: Article |
Times cited : (67)
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References (26)
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