Preparation and piezoresistive properties of polycrystalline SnO2 films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 3 A, 1998, Pages 963-964

  Onuma, Yoshiharu ^a   Wang, Zhanhe ^a   Ito, Hironobu ^a   Nakao, Masato ^a   Kamimura, Kiichi ^a  

^a SHINSHU UNIVERSITY   (Japan)

Author keywords

Piezoresistance; Sensor; Sputtering; Thin film; Tin oxide

Indexed keywords

CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; TIN COMPOUNDS; X RAY DIFFRACTION;

CANTILEVER METHODS; PIEZORESISTANCE;

METALLIC FILMS;

EID: 0032027669     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.963     Document Type: Article

References (8)

1. G. Gaggiotti, A. Galdikas, G. Mattogno and A. Setkus: J. Appl. Phys. 76 (1994) 4467.
2. J. Dutta, S. Perrin, T. Emeraud, J.M. Laurent and A. Smith: J. Mater. Sci. 30 (1995) 53.
3. W.A. Badawy, H. Afify and E.M.Elgiar: J. Electrochem. Soc. 137 (1995) 1592.
4. Y. Onuma and K. Sekiya: Jpn. J. Appl. Phys. 42 (1972) 20.
5. K. Takahashi: Handotai Kogaku (Semiconductor Engineering) (Morikita Tokyo, 1976) p. 289 [in Japanese].
6. K. Arshak and R. Perrem: Sens. & Actuat. A 36 (1993) 73.
7. T. Homma, K. Kamimura, H. Cai and Y. Onuma: Sens. & Actual. A 46 (1994) 93.
8. Y. Onuma, K. Kamimura, Y. Nagura, C. HaiYi and M. Kiuchi: Sens. & Mater. 2 (1991) 207.