Optical characterization of fully programmable MEMS diffraction gratings

Optics Express

Volumn 20, Issue 23, 2012, Pages 25267-25274

  Zamkotsian, F ^a   Timotijevic, B ^b   Lockhart, R ^c   Stanley, R P ^b   Lanzoni, P ^a   Luetzelschwab, M ^b   Canonica, M ^d   Noell, W ^c   Tormen, M ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b CSEM   (Switzerland)

^c EPFL   (Switzerland)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXTINCTION RATIOS; FILL FACTOR; MICRO MIRROR; OPTICAL CHARACTERIZATION; SPECTRA GENERATORS;

DIFFRACTION; LIGHT MODULATORS; MIRRORS;

DIFFRACTION GRATINGS;

EID: 84869048171     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.025267     Document Type: Article

References (12)

1. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett. 17(9), 688-690 (1992).
2. S. D. Senturia, D. R. Day, M. A. Butler, and M. C. Smith, "Programmable diffraction gratings and their uses in displays, spectroscopy, and communications," J. Microlithogr., Microfabr., Microsyst. 4, 041401 (2005).
3. O. Solgaard, D. Lee, Y. Kyoungsik, U. Krishnamoorthy, K. Li, and J. P. Heritage, "Microoptical phased arrays for spatial and spectral switching," IEEE Commun. Mag. 41(3), 96-102 (2003).
4. R. Lockhart, M. Tormen, P. Niedermann, T. Overstoltz, A. Hoogerwerf, and R. P. Stanley, "High efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers," in Proceedings of IEEE/LEOS Conference on Optical MEMS and Nanophotonics (Freiburg, Germany, 2008), pp. 33-34.
5. G. B. Hocker, "The Polychromator: a MEMS diffraction grating for synthetic spectra," in Proceedings of the Solid-State Sensor and Actuator Workshop (Hilton Head Island, USA, 2000), pp. 89-91.
6. F. Zamkotsian, P. Lanzoni, T. Viard, and C. Buisset, "New astronomical instrument using MOEMS-based diffraction programmable gratings," Proc. SPIE 7208, 72080I, 72080I-12 (2009).
7. D. M. Burns and V. M. Bright, "Development of microelectromechanical variable blaze gratings," Sens. Actuators A Phys. 64(1), 7-15 (1998).
8. B. Timotijevic, R. Lockhart, R. Stanley, M. Luetzelschwab, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, and M. Tormen, "Microfabrication of optically flat silicon micro-mirrors for fully programmable microdiffraction gratings," in Proc. Eurosensors XXVI (2012).
9. S. Senturia, "Programmable diffraction gratings and their uses in displays, spectroscopy, and communications," Proc. SPIE 5348, 1-6 (2004), doi:10.1117/12.523978.
10. J. Trisnadi, C. Carlisle, and R. Monteverde, "Overview and applications of Grating Light Valve based optical write engines for high-speed digital imaging," Proc. SPIE 5348, 52-64 (2004), doi:10.1117/12.525898.
11. M. I. Younis, MEMS Linear and Nonlinear Statics and Dynamics (Springer, 2011).
12. TM technology," Proc. SPIE 5348, 76-88 (2004), doi:10.1117/12.525886.