High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 33-34

  Lockhart, R ^a   Tormen, M ^a   Niedermann, P ^a   Overstolz, T ^a   Hoogerwerf, A ^a   Stanley, R P ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; INFRARED DEVICES; MICROELECTROMECHANICAL DEVICES; PHOTONICS;

ACTIVE AREAS; BLAZED GRATINGS; EXTERNAL CAVITY LASERS; FILTERING; INFRARED; MICROSPECTROMETERS; OPTICAL CHARACTERIZATIONS; SECOND GENERATIONS;

MEMS;

EID: 54049092915     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607814     Document Type: Conference Paper

References (3)

1. A.Q. Liu, X.M. Zhang, "A review of MEMS external-cavity tunable lasers", J. Micromech. Microeng., vol. 17, no. 1, pp. R1-R13, 2007.
2. X. Li, C. Antoine, D. Lee, J.-S. Wang, O. Solgaard, "Tunable blazed gratings," J. Microelectromech. Syst., vol. 15, no. 3, pp. 597-604, 2006.
3. M. Tormen, Y.-A. Peter, Ph. Niedermann, A. Hoogerwerf, R. Stanley, "Deformable MEMS grating for wide tunability and high operating speed," Journal of Optics A: Pure and Applied Optics, vol. 8, no. 7, pp. S337-40, 2006.