Programmable diffraction gratings and their uses in displays, spectroscopy, and communications

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 4, 2005, Pages

  Senturia, Stephen D ^a,b   Day, David R ^b   Butler, Michael A ^b   Smith, Malcolm C ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Polychromix   (United States)

Author keywords

Actuators; Diffraction; Displays; MEMS; MOEMS; Optical communications; Spectroscopy

Indexed keywords

ELECTROSTATIC ACTUATION; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROOPTICAL ELECTROMECHANICAL SYSTEMS (MOEMS); PROJECTION DISPLAYS;

DISPLAY DEVICES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; SPECTROSCOPY;

DIFFRACTION GRATINGS;

EID: 33747597276     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2107687     Document Type: Review

References (7)

1. S. D. Senturia, "Programmable diffraction gratings and their uses in displays, spectroscopy, and communication," Proc. SPIE 5348, 1-6 (2004).
2. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett. 17, 688-690 (1992).
3. S. D. Senturia, Microsystem Design, Chap. 20, Kluwer Academic Publishers, New York (2001).
4. G. B. Hocker, D. Youngner, E. Deutsch, A. Volpicelli, S. Senturia, M. Butler, M. Sinclair, T. Plowman, and A. J. Ricco, "The polychromator: A MEMS diffraction grating for synthetic spectra," Solid-State Sensor Actuator Workshop, pp. 89-91 (2000).
5. E. R. Deutsch, J. P. Bardhan, S. D. Senturia, G. B. Hocker, D. W. Youngner, M. B. Sinclair, and M. A. Butler, "A large-travel vertical planar actuator with improved stability," Proc. 12th Intl. Conf. Solid-State Sensors, Actuators, Microsyst. (Transducers 2003), pp. 352-357 (2003).
6. M. B. Sinclair, K. B. Pfeifer, M. A. Butler, S. D. Senturia, E. R. Deutsch, E. Cabuz, D. Youngner, and G. B. Hocker, "A MEMS-based correlation radiometer," Proc. SPIE 5346, 37-47 (2004).
7. Encyclopaedia Britannica, see http://www.britannica.com/eb/ article?tocid=9042683, www.libertyvegetableoil.com/products.html, and www.organic-planet.com/products/h_Spanish_Olive_Oil.html.