Programmable Diffraction Gratings And Their Uses in Displays, Spectroscopy, and Communications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5348, Issue , 2004, Pages 1-6

  Senturia, Stephen D ^a,b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Polychromix   (United States)

Author keywords

Actuators; Diffraction; Displays; MEMS; Optical communications; Spectroscopy

Indexed keywords

POLYCHROMIC DYNAMIC CHANNEL ORCHESTRATOR™; PROGRAMMABLE DIFFRACTION GRATINGS; SILICON LIGHT MACHINES (CO); WAVELENGTH-MANAGEMENT PRODUCTS;

DIELECTRIC MATERIALS; DIFFRACTION GRATINGS; DISPLAY DEVICES; ELECTROSTATIC ACTUATORS; OPTICAL COMMUNICATION; PROJECTION SYSTEMS; SEMICONDUCTOR MATERIALS; SPECTROMETERS; SPECTROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 2142835933     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.523978     Document Type: Conference Paper

References (5)

1. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, &Deformable grating optical modulator, Optics Letters, vol. 17, pp. 688-690, 1992.
2. An analysis of the Silicon Light Machines technology based on figures supplied by Silicon Light Machines can be found in Chapter 20 of S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001.
3. G. B. Hocker, D. Youngner, E. Deutsch, A. Volpicelli, S. Senturia, M. Butler, M. Sinclair, T. Plowman, and A. J. Ricco, &The Polychromator: A MEMS Diffraction Grating for Synthetic Spectra,& Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 4-8, 2000, pp. 89-91.
4. th Int'L. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2003), Boston, June 9-13, 2003, pp. 352-357.
5. M. B. Sinclair, M. A. Butler, S. D. Senturia, E. Deutsch, G. B. Hocker, and D. Youngner, &A MEMS-Based Correlation Radiometer,& this conference, Paper 5346-4, Wednesday, January 28, 2004.