Flow of nanosize cluster-containing plasma in a magnetron discharge

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 75, Issue 6, 2007, Pages

  Smirnov, Boris M ^a   Shyjumon, Ibrahimkutty ^b   Hippler, Rainer ^b  

^a JOINT INSTITUTE FOR HIGH TEMPERATURES   (Russian Federation)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DRIFT CHAMBERS; ELECTRIC FIELDS; FILTERS (FOR FLUIDS); NANOCLUSTERS; PLASMAS;

MAGNETRON DISCHARGE; MAGNETRON PLASMA; QUADRUPOLE MASS FILTERS; SECONDARY PLASMAS;

FLOW OF GASES;

EID: 34547373039     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.75.066402     Document Type: Article

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