The atomic layer deposition array defined by etch-back technique: A new method to fabricate TiO 2 nanopillars, nanotubes and nanochannel arrays

Nanotechnology

Volumn 23, Issue 48, 2012, Pages

  Huang, Yujian ^a   Pandraud, Grégory ^a   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ETCH-BACK TECHNIQUE; FABRICATION METHOD; FUNCTIONAL SURFACES; HIGH ASPECT RATIO NANO-STRUCTURES; HIGH QUALITY; HIGH THROUGHPUT; NANO CHANNELS; NANO-PILLAR ARRAYS; NANOPILLARS; PHYSICAL AND CHEMICAL PROPERTIES; PROCESS STEPS; TIO; VARIOUS SUBSTRATES;

ASPECT RATIO; ATOMIC LAYER DEPOSITION; CHEMICAL PROPERTIES; TITANIUM DIOXIDE;

NANOTUBES;

EID: 84869026634     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/48/485306     Document Type: Article

References (25)

1. Kaji N, Tezuka Y, Takamura Y, Ueda M, Nishimoto T, Nakanishi H, Horiike Y and Baba Y 2003 Anal. Chem. 76 15-22
2. Albu S P, Ghicov A, Macak J M, Hahn R and Schmuki P 2007 Nano Lett. 7 1286-9
3. Huh D, Mills K L, Zhu X, Burns M A, Thouless M D and Takayama S 2007 Nature Mater. 6 424-8
4. Van Noort R 1987 J. Mater. Sci. 22 3801-11
5. Bennett J M et al 1989 Appl. Opt. 28 3303-17
6. Hashimoto K, Irie H and Fujishima A 2005 Japan. J. Appl. Phys. 44 8269
7. Bach U, Lupo D, Comte P, Moser J E, Weissortel F, Salbeck J, Spreitzer H and Gratzel M 1998 Nature 395 583-5
8. Hotov I, Kostič I, Haščík Š, eháček V, Liday J and Sitter H 2011 J. Electr. Eng. 62 363-6
9. Ganesan R, Dumond J, Saifullah M S M, Lim S H, Hussain H and Low H Y 2012 ACS Nano 6 1494-502
10. Macák J M, Tsuchiya H and Schmuki P 2005 Angew. Chem. Int. Edn 44 2100-2
11. Tian Z R, Voigt J A, Liu J, McKenzie B and Xu H 2003 J. Am. Chem. Soc. 125 12384-5
12. Liu S M, Gan L M, Liu L H, Zhang W D and Zeng H C 2002 Chem. Mater. 14 1391-7
13. King J S, Graugnard E and Summers C J 2005 Adv. Mater. 17 1010-3
14. Bernal A, Tselev A, Kalinin S and Bassiri-Gharb N 2012 Adv. Mater. 24 1160-5
15. Schirmer M, Walz M M, Vollnhals F, Lukasczyk T, Sandmann A, Chen C, Steinrück H P and Marbach H 2011 Nanotechnology 22 085301
16. Duoss E B, Twardowski M and Lewis J A 2007 Adv. Mater. 19 3485-9
17. Norasetthekul S, Park P Y, Baik K H, Lee K P, Shin J H, Jeong B S, Shishodia V, Lambers E S, Norton D P and Pearton S J 2001 Appl. Surf. Sci. 185 27-33
18. van Rijn C J M, Veldhuis G J and Kuiper S 1998 Nanotechnology 9 343
19. Mor G K, Shankar K, Paulose M, Varghese O K and Grimes C A 2005 Nano Lett. 6 215-8
20. Thorsen T, Maerkl S J and Quake S R 2002 Science 298 580-4
21. Nicole R D and Devin K B 2010 J. Vac. Sci. Technol. B 28 C6I7-C6I10
22. Joannopoulos J D, Villeneuve P R and Fan S 1997 Solid State Commun. 102 165-73
23. Arpin K A, Mihi A, Johnson H T, Baca A J, Rogers J A, Lewis J A and Braun P V 2010 Adv. Mater. 22 1084-101
24. Huang Y, Pandraud G and Sarro P M 2012 Opt. Lett. 37 3162-4
25. Huang Z, Geyer N, Werner P, de Boor J and Gösele U 2010 Adv. Mater. 23 285-308