Structural and physical property studies of amorphous Zn-In-Sn-O thin films

Journal of the American Ceramic Society

Volumn 95, Issue 11, 2012, Pages 3657-3664

  Proffit, Diana E ^a   Ma, Qing ^b   Buchholz, Donald B ^a   Chang, Robert P H ^a   Bedzyk, Michael J ^a   Mason, Thomas O ^a  

^a Northwestern University   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS X-RAY SCATTERING; CO-DOPED; COORDINATION NUMBER; COORDINATION SHELLS; LASER DEPOSITIONS; LOCAL STRUCTURE; OXYGEN PRESSURE; SN-DOPED; STRUCTURAL AND PHYSICAL PROPERTIES; STRUCTURAL CHARACTERISTICS; UNIT VOLUME; ZN CATIONS; ZNO;

AMORPHOUS FILMS; ELECTRIC PROPERTIES; OXYGEN; POSITIVE IONS; PULSED LASER DEPOSITION; THIN FILMS; TIN; X RAY ABSORPTION SPECTROSCOPY; ZINC OXIDE;

ZINC;

EID: 84868471629     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2012.05390.x     Document Type: Article

References (40)

1. E. Fortunato, D. Ginley, H. Hosono, and, D. C. Paine, " Transparent Conducting Oxides for Photovoltaics," MRS Bull., 32 [ 3 ] 242-7 (2007).
2. J. F. Wager, D. A. Keszler, and, R. E. Presley, Transparent Electronics. Springer, New York, 2008.
3. D. S. Ginley, H. Hosono, and, D. C. Paine, Handbook of Transparent Conductors. Springer, New York, 2010.
4. 2 System," Chem. Mater., 22 [ 12 ] 3569-679 (2010).
5. T. Kamiya, and, H. Hosono, " Material Characteristics and Applications of Transparent Amorphous Oxide Semiconductors," NPG Asia Mater., 2, 15-22 (2010).
6. J. Liu, D. B. Buchholz, R. P. H. Chang, A. Facchetti, and, T. J. Marks, " High-Performance Flexible Transparent Thin-Film Transistors Using a Hybrid Gate Dielectric and Amorphous Zinc Indium Tin Oxide Channel," Adv. Mater., 22 [ 21 ] 2333-7 (2010).
7. M. P. Taylor, D. W. Readey, M. F. A. M. Van-Hest, C. W. Teplin, J. L. Alleman, M. S. Dabney, L. M. Gedvilas, B. M. Keyes, B. To, J. D. Perkins, and, D. S. Ginley, " The Remarkable Thermal Stability of Amorphous In-Zn-O Transparent Conductors," Adv. Funct. Mater., 18 [ 20 ] 3169-78 (2008).
8. J. A. Jeong, H. K. Kim, and, S. I. Na, " Low Resistance and High Transparent Amorphous IZTO Electrode Cosputtered by Linear Facing Target Sputtering for Organic Photovoltaics," Electrochem. Solid-State Lett., 12 [ 9 ] J80-2 (2009).
9. G. S. Heo, Y. Matsumoto, I. G. Gim, J. W. Park, K. Y. Kim, and, T. W. Kim, " Fabrication of Cosputtered Zn-In-Sn-O Films and Their Applications to Organic Light-Emitting Diodes," Solid State Commun., 149 [ 41-42 ] 1731-4 (2009).
10. G. S. Heo, Y. Matsumoto, I. G. Gim, H. K. Lee, J. W. Park, and, T. W. Kim, " Transparent Conducting Amorphous Zn-In-Sn-O Anode for Flexible Organic Light-Emitting Diodes," Solid State Commun., 150 [ 3-4 ] 223-5 (2010).
11. D. S. Ginley, and, C. Bright, " Transparent Conducting Oxides," MRS Bull., 25 [ 8 ] 15-8 (2000).
12. 3," Chem. Mater., 9 [ 12 ] 3121-6 (1997).
13. S. P. Harvey, T. O. Mason, D. B. Buchholz, R. P. H. Chang, C. Körber, and, A. Klein, " Carrier Generation and Inherent Off-Stoichiometry in Zn,Sn Co-Doped Indium Oxide (ZITO) Bulk and Thin Film Specimens," J. Am. Ceram. Soc., 91 [ 2 ] 467-72 (2008).
14. D. B. Buchholz, J. Liu, T. J. Marks, M. Zhang, and, R. P. H. Chang, " Control and Characterization of the Structural, Electrical, and Optical Properties of Amorphous Zinc-Indium-Tin Oxide Thin Films," ACS Appl. Mater. Interfaces, 1 [ 10 ] 2147-53 (2009).
15. D. E. Proffit, D. B. Buchholz, R. P. H. Chang, M. J. Bedzyk, T. O. Mason, and, Q. Ma, " X-Ray Absorption Spectroscopy Study of the Local Structures of Crystalline Zn-In-Sn Oxide Thin Films," J. Appl. Phys., 106 [ 11 ] 113524, 6 pp (2009).
16. J. J. Rehr, and, R. C. Albers, " Theoretical Approaches to X-Ray Absorption Fine Structure," Rev. Mod. Phys., 72 [ 3 ] 621-54 (2000).
17. P. H. Fuoss, P. Eisenberger, W. K. Warburton, and, A. Bienenstock, " Application of Differential Anomalous X-Ray-Scattering to Structural Studies of Amorphous Materials," Phys. Rev. Lett., 46 [ 23 ] 1537-40 (1981).
18. 100-x Glasses Studied by Differential X-Ray Anomalous Scattering and X-Ray Absorption Spectroscopy," Phys. Rev. B, 48 [ 22 ] 16332-46 (1993).
19. 3 as Measured by Differential Anomalous X-Ray Scattering," Phys. Rev. B, 52 [ 14 ] 10025-34 (1995).
20. 3 at Two Wavelengths," Acta Cryst., 20, 723-8 (1966).
21. G. B. Gonzalez, T. O. Mason, J. P. Quintana, O. Warschkow, D. E. Ellis, J. H. Hwang, J. P. Hodges, and, J. D. Jorgensen, " Defect Structure Studies of Bulk and Nano-Indium-Tin Oxide," J. Appl. Phys., 96 [ 7 ] 3912-20 (2004).
22. G. Frank, and, H. Köstlin, " Electrical Properties and Defect Model of Tin-Doped Indium Oxide Layers," Appl. Phys. A, 27 [ 4 ] 197-206 (1982).
23. S. P. Harvey, T. O. Mason, Y. Gassenbauer, R. Schafranek, and, A. Klein, " Surface Versus Bulk Electronic/Defect Structures of Transparent Conducting Oxides: I. Indium Oxide and ITO," J. Phys. D: Appl. Phys., 39 [ 18 ] 3959-68 (2006).
24. 3 Transparent Conducting Oxides," Phys. Chem. Chem. Phys., 11 [ 17 ] 3099-104 (2009).
25. 3 (x a 0.4),;quot J. Solid State Chem., 183 [ 9 ] 761-8 (2010).
26. 3 Film by Grazing Incidence X-Ray Scattering (GIXS) with Synchrotron Radiation," Thin Solid Films, 496 [ 1 ] 95-8 (2006).
27. 3-ZnO Films by Grazing Incidence X-Ray Scattering (GIXS) with Synchrotron Radiation," Thin Solid Films, 516 [ 17 ] 5818-21 (2008).
28. T. Eguchi, H. Inoue, A. Masuno, K. Kita, and, F. Utsuno, " Oxygen Close-Packed Structure in Amorphous Indium Zinc Oxide Thin Films," Inorg. Chem., 49 [ 18 ] 8298-304 (2010).
29. K. Nomura, T. Kamiya, H. Ohto, T. Uruga, M. Hirano, and, H. Hosono, " Local Coordination Structure and Electronic Structure of the Large Electron Mobility Amorphous Oxide Semiconductor In-Ga-Zn-O: Experiment and Ab Initio Calculations," Phys. Rev. B, 75 [ 3 ] 035212, 5 pp (2007).
30. D. Y. Cho, J. Song, K. D. Na, C. S. Hwang, J. H. Jeong, J. K. Jeong, and, Y. G. Mo, " Local Structure and Conduction Mechanism in Amorphous In-Ga-Zn-O Films," Appl. Phys. Lett., 94, 112112, 3 pp (2009).
31. 3 (a-ZITO)," Z. Anorg. Allg. Chem., 637 [ 7-8 ] 885-94 (2011).
32. J. Rosen, and, O. Warschkow, " Electronic Structure of Amorphous Indium Oxide Transparent Conductors," Phys. Rev. B, 80 [ 11 ] 115215, 10 pp (2009).
33. B. Ravel, and, M. Newville, " ATHENA, ARTEMIS, HEPHAESTUS: Data Analysis for X-Ray Absorption Spectroscopy Using IFEFFIT," J. Synchrotron Radiat., 12, 537-41 (2005).
34. Y. Joly, " X-Ray Absorption Near-Edge Structure Calculations Beyond the Muffin-Tin Approximation," Phys. Rev. B, 63 [ 12 ] 125120, 10 pp (2001).
35. V. Petkov, " RAD, a Program for Analysis of X-Ray Diffraction Data From Amorphous Materials for Personal Computers," J. Appl. Crystallogr., 22, 387-9 (1989).
36. D. Waasmaier, and, A. Kirfel, " New Analytical Scattering-Factor Functions for Free Atoms and Ions," Acta Cryst. A, 51, 416-31 (1995).
37. N. G. Alexandropoulos, M. J. Cooper, P. Suortti, and, B. T. M. Willis, " Correction of Systematic Errors "; pp. 653-65 in International Tables for Crystallography Vol. C, Chapter 7.4, John Wiley & Sons, Hoboken, NJ, 2006.
38. S. Sasaki, KEK Report 83-22, National Laboratory for High Energy Physics, Tsukuba, Japan, 1983.
39. F. O. Adurodija, L. Semple, and, R. Brüning, " Real-Time In Situ Crystallization and Electrical Properties of Pulsed Laser Deposited Indium Oxide Thin Films," Thin Solid Films, 492 [ 1-2 ] 153-7 (2005).
40. 3 and ITO Thin Films," J. Mater. Sci., 41 [ 21 ] 7096-102 (2006).