Structural study of amorphous In2O3 film by grazing incidence X-ray scattering (GIXS) with synchrotron radiation

Thin Solid Films

Volumn 496, Issue 1, 2006, Pages 95-98

  Utsuno, Futoshi ^a   Inoue, Hiroyuki ^a   Yasui, Itaru ^b   Shimane, Yukio ^c   Tomai, Shigekazu ^c   Matsuzaki, Shigeo ^c   Inoue, Kazuyoshi ^c   Hirosawa, Ichiro ^d   Sato, Masugu ^d   Honma, Tetsuo ^d  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNITED NATIONS UNIVERSITY   (Japan)

^c IDEMITSU KOSAN CO LTD   (Japan)

^d JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

Amorphous In2O3; GIXS; Simulation; Structure; Synchrotron radiation

Indexed keywords

INDIUM COMPOUNDS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; SYNCHROTRON RADIATION; X RAY SCATTERING;

AMORPHOUS IN2O3; GIXS; STRUCTURE;

AMORPHOUS FILMS;

EID: 28044462696     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.256     Document Type: Conference Paper

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