Integration of servo and high bit aspect ratio data patterns on nanoimprint templates for patterned media

IEEE Transactions on Magnetics

Volumn 48, Issue 11, 2012, Pages 2757-2760

  Lille, J ^a   Ruiz, R ^a   Wan, L ^a   Gao, H ^a   Dhanda, A ^a   Zeltzer, G ^a   Arnoldussen, T ^a   Patel, K ^a   Tang, Y ^a   Kercher, D ^a   Albrecht, T R ^a  

^a HITACHI AMERICA LTD   (United States)

Author keywords

Nanoimprint lithography; Patterned media; Self assembly; Servo; Template

Indexed keywords

BIT-PATTERNED MEDIA; DEFECTIVITY; DIRECTED SELF-ASSEMBLY; E-BEAM LITHOGRAPHY; HIGH QUALITY; HIGH THROUGHPUT; NANO-IMPRINT; PATTERN FIDELITY; PATTERNED MEDIAS; RATIO DATA; TEMPLATE; TEMPLATE FABRICATION; THERMALLY STABLE;

ASPECT RATIO; BLOCK COPOLYMERS; ELECTRON BEAM LITHOGRAPHY; MAGNETIC STORAGE; NANOIMPRINT LITHOGRAPHY; SELF ASSEMBLY; SERVOMOTORS;

FABRICATION;

EID: 84867832640     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2012.2192916     Document Type: Article

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