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Volumn 43, Issue 12, 2007, Pages 4106-4112

Study of lithographically defined data track and servo patterns

Author keywords

Electron beam lithography; Patterned media; Perpendicular magnetic recording; Servo

Indexed keywords

COMPUTATIONAL GEOMETRY; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; MATHEMATICAL MODELS;

EID: 36348935194     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.908279     Document Type: Article
Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.