Infrared dielectric properties of low-stress silicon nitride

Optics Letters

Volumn 37, Issue 20, 2012, Pages 4200-4202

  Cataldo, Giuseppe ^a,b   Beall, James A ^c   Cho, Hsiao Mei ^c   McAndrew, Brendan ^a   Niemack, Michael D ^c   Wollack, Edward J ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b UNIVERSITIES SPACE RESEARCH ASSOCIATION   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FUNCTIONS; DIELECTRIC PARAMETERS; HIGH-PERFORMANCE CIRCUITS; LOW STRESS; SILICON NITRIDE THIN FILMS; TRANSMITTANCE SPECTRA;

DIELECTRIC PROPERTIES;

SILICON NITRIDE;

EID: 84867475425     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.37.004200     Document Type: Article

References (19)

1. D. J. Goldie, A. V. Velichko, D. M. Glowacka, and S. Withington, Appl. Phys. 109, 084507 (2011).
2. G. Wang, V. Yefremenko, V. Novosad, A. Datesman, J. Pearson, R. Divan, C. L. Chang, L. Bleem, A. T. Crites, J. Mehl, T. Natoli, J. McMahon, J. Sayre, J. Ruhl, S. S. Meyer, and J. E. Carlstrom, IEEE Trans. Appl. Supercond. 21, 232 (2011).
3. J. M. Martinis, K. B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. D. Osborn, K. Cicak, S. Oh, D. P. Pappas, R. W. Simmonds, and C. C. Yu, Phys. Rev. Lett. 95, 210503 (2005).
4. H. Paik and K. D. Osborn, Appl. Phys. Lett. 96, 072505 (2010).
5. T. Eriksson, S. Jiang, and C. Granqvist, Appl. Opt. 24, 745 (1985).
6. E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
7. E. D. Palik, Handbook of Optical Constants of Solids (Elsevier, 1998), Vol. 1, pp. 771-774.
8. M. Sekimoto, H. Yoshihara, and T. Ohkubo, J. Vac. Sci. Technol. 21, 1017 (1982).
9. T. Makino, J. Electrochem. Soc. 130, 450 (1983).
10. Addison Engineering, 150 Nortech Parkway, San Jose, California 95134 (Orientation h100i, Czochralski, p-type B doped, bulk resistivity < 0.005 Ω cm).
11. F. Gervais, in Infrared and Millimeter Waves, K. J. Button, ed. (Academic, 1983), Vol. 8, Part I, pp. 284-287.
12. C. C. Kim, J. W. Garland, H. Abad, and P. M. Raccah, Phys. Rev. B 45, 11749 (1992).
13. P. Yeh, Optical Waves in Layered Media (Wiley, 1988), pp. 102-111.
14. M. C. Biggs, in Towards Global Optimization, L. C. W. Dixon and G. P. Szergo, eds. (North-Holland, 1975), pp. 341-349.
15. M. J. D. Powell, in Mathematical Programming: The State of the Art, A. Bachem, M. Grotschel, and B. Korte, eds. (Springer Verlag, 1983), pp. 288-311.
16. L. D. Landau and E. M. Lifshitz, Electrodyamics of Continuous Media (Pergamon, 1960), Vol. 8, pp. 253-262.
17. M. Mori and T. Ooura, in Applicable Analysis (World Scientific Series, 1993), Vol. 2, pp. 301-308.
18. R. Nitsche and T. Fritz, Phys. Rev. B 70, 195432 (2004).
19. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes -The Art of Scientific Computing (Cambridge Univ., 2007), pp. 799-806.