SCOPUS 정보 검색 플랫폼

Volumn 96, Issue 7, 2010, Pages

Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT MODEL; DIELECTRIC LOSS TANGENT; HYDROGEN IMPURITY; HYDROGENATED SILICON; LC RESONATORS; SUPERCONDUCTING QUANTUM CIRCUIT; TWO-LEVEL SYSTEM;

DIELECTRIC DEVICES; DIELECTRIC LOSSES; SILICON NITRIDE; SUPERCONDUCTIVITY; TANNING;

AMORPHOUS SILICON;

EID: 77249138356 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3309703 Document Type: Article

Times cited : (113)

References (17)

1
- 18144407315
- 0031-9007,. 10.1103/PhysRevLett.94.027005
- I. Siddiqi, R. Vijay, F. Pierre, C. M. Wilson, L. Frunzio, M. Metcalfe, C. Rigetti, R. J. Schoelkopf, M. H. Devoret, D. Vion, and D. Esteve, Phys. Rev. Lett. 0031-9007 94, 027005 (2005). 10.1103/PhysRevLett.94.027005
- (2005) Phys. Rev. Lett. , vol.94 , pp. 027005
- Siddiqi, I.¹ Vijay, R.² Pierre, F.³ Wilson, C.M.⁴ Frunzio, L.⁵ Metcalfe, M.⁶ Rigetti, C.⁷ Schoelkopf, R.J.⁸ Devoret, M.H.⁹ Vion, D.¹⁰ Esteve, D.¹¹

4
- 3743048866
- 10.1016/0375-9601(77)90510-2
- M. von Schickfus and S. Hunklinger, Phys. Lett. A 64, 144 (1977). 10.1016/0375-9601(77)90510-2
- (1977) Phys. Lett. A , vol.64 , pp. 144
- Von Schickfus, M.¹ Hunklinger, S.²

5
- 41049109897
- 0003-6951,. 10.1063/1.2898887
- A. D. O'Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, Appl. Phys. Lett. 0003-6951 92, 112903 (2008). 10.1063/1.2898887
- (2008) Appl. Phys. Lett. , vol.92 , pp. 112903
- O'Connell, A.D.¹ Ansmann, M.² Bialczak, R.C.³ Hofheinz, M.⁴ Katz, N.⁵ Lucero, E.⁶ McKenney, C.⁷ Neeley, M.⁸ Wang, H.⁹ Weig, E.M.¹⁰ Cleland, A.N.¹¹ Martinis, J.M.¹²

7
- 44849121865
- 0003-6951,. 10.1063/1.2937837
- R. Barends, H. L. Hortensius, T. Zijlstra, J. J. A. Baselmans, S. J. C. Yates, J. R. Gao, and T. M. Klapwijk, Appl. Phys. Lett. 0003-6951 92, 223502 (2008). 10.1063/1.2937837
- (2008) Appl. Phys. Lett. , vol.92 , pp. 223502
- Barends, R.¹ Hortensius, H.L.² Zijlstra, T.³ Baselmans, J.J.A.⁴ Yates, S.J.C.⁵ Gao, J.R.⁶ Klapwijk, T.M.⁷

8
- 28844465674
- 0031-9007,. 10.1103/PhysRevLett.95.210503
- J. M. Martinis, K. B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. Osborn, K. Cicak, S. Oh, D. P. Pappas, R. W. Simmonds, and C. C. Yu, Phys. Rev. Lett. 0031-9007 95, 210503 (2005). 10.1103/PhysRevLett.95.210503
- (2005) Phys. Rev. Lett. , vol.95 , pp. 210503
- Martinis, J.M.¹ Cooper, K.B.² McDermott, R.³ Steffen, M.⁴ Ansmann, M.⁵ Osborn, K.⁶ Cicak, K.⁷ Oh, S.⁸ Pappas, D.P.⁹ Simmonds, R.W.¹⁰ Yu, C.C.¹¹

11
- 0000513694
- 0021-8979,. 10.1063/1.349544
- G. N. Parsons, J. H. Souk, and J. Batey, J. Appl. Phys. 0021-8979 70, 1553 (1991). 10.1063/1.349544
- (1991) J. Appl. Phys. , vol.70 , pp. 1553
- Parsons, G.N.¹ Souk, J.H.² Batey, J.³

12
- 33645374893
- 0734-2101,. 10.1116/1.573832
- G. Lucovsky, P. D. Richard, D. V. Tsu, S. Y. Lin, and R. J. Markunas, J. Vac. Sci. Technol. A 0734-2101 4, 681 (1986). 10.1116/1.573832
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 681
- Lucovsky, G.¹ Richard, P.D.² Tsu, D.V.³ Lin, S.Y.⁴ Markunas, R.J.⁵

13
- 33748887183
- 0163-1829,. 10.1103/PhysRevB.42.3666
- Z. Yin and F. W. Smith, Phys. Rev. B 0163-1829 42, 3666 (1990). 10.1103/PhysRevB.42.3666
- (1990) Phys. Rev. B , vol.42 , pp. 3666
- Yin, Z.¹ Smith, F.W.²

15
- 31744436718
- 0163-1829,. 10.1103/PhysRevB.33.7069
- D. V. Tsu, G. Lucovsky, and M. J. Mantini, Phys. Rev. B 0163-1829 33, 7069 (1986). 10.1103/PhysRevB.33.7069
- (1986) Phys. Rev. B , vol.33 , pp. 7069
- Tsu, D.V.¹ Lucovsky, G.² Mantini, M.J.³

16
- 0000416063
- 0034-4885,. 10.1088/0034-4885/50/12/003
- W. A. Phillips, Rep. Prog. Phys. 0034-4885 50, 1657 (1987). 10.1088/0034-4885/50/12/003
- (1987) Rep. Prog. Phys. , vol.50 , pp. 1657
- Phillips, W.A.¹

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