A robust batch-fabricated high-density cochlear electrode array

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 1007-1010

  Johnson, Angelique C ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COCHLEAR ELECTRODES; HIGH-DENSITY; PARYLENES; STACKED LAYER; STIFFNESS CONTROL;

MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING; STIFFNESS;

FABRICATION;

EID: 77952780357     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442379     Document Type: Conference Paper

References (5)

1. J. Cavuoto,"The Market for Neurotechnology: 2008 - 2012", Neurotech Reports, December 2007.
2. P. T. Bhatti, S. Lee, and K. D. Wise, "A 32-Site 4-Channel Cochlear Electrode Array," IEEE J. Solid-St. Circuits, pp. 2965-2973, December 2006.
3. J. Wang and K. D. Wise, "A Thin-Film Cochlear Electrode Array with Integrated Position Sensing," IEEE J. of MicroElectroMech. Syst., 18, pp. 385-395, April 2009.
4. J. Chen, K. D. Wise, J. F. Hetke, and S. C. Bledsoe, Jr., "A Multichannel Neural Probe for Selective Chemical Delivery at the Cellular Level," IEEE Trans. Biomed. Engr., 44, pp. 760-769, August 1997.
5. P.-J. Chen, et al., "Design, Fabrication and Characterization of Monolithic Embedded Parylene Microchannels in Silicon Substrate", Lab on a Chip, vol. 6, pp. 803-810, 2006.