Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 254-261

  Chu, Huai Yuan ^a   Kuo, Tzu Ying ^a   Chang, Baowen ^a   Lu, Shao Wei ^a   Chiao, Chuan Chin ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

3D Multi electrode array; Recording of retinal neurons; SOI wafer

Indexed keywords

ELECTRODES; LIGHT AMPLIFIERS; MICROELECTROMECHANICAL DEVICES; OPTICAL INTERCONNECTS; SIGNAL PROCESSING; SILICON WAFERS;

3D MULTI-ELECTRODE ARRAY; RECORDING OF RETINAL NEURONS; SOI WAFER;

ARRAYS;

EID: 33745823113     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.010     Document Type: Article

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