Selective deposition of CuO/SnO 2 sol-gel on porous SiO 2 suitable for the fabrication of MEMS-based H 2S sensors

Sensors and Actuators, B: Chemical

Volumn 173, Issue , 2012, Pages 802-810

  Ebrahimi, A ^a   Pirouz, A ^a   Abdi, Y ^a   Azimi, S ^a   Mohajerzadeh, S ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

CuO SnO 2; Gas sensor; MEMS; Porous layer; Silicon; Sol gel

Indexed keywords

CUO/SNO 2; MEMS; POROUS LAYERS; SILICON; SOL-GEL;

CHEMICAL SENSORS;

EID: 84867094698     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.07.104     Document Type: Article

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