MEMS-based hydrogen gas sensors

Sensors and Actuators, B: Chemical

Volumn 117, Issue 1, 2006, Pages 10-16

  DiMeo Jr , Frank ^a   Chen, Ing Shin ^a   Chen, Philip ^a   Neuner, Jeffrey ^a   Roerhl, Andreas ^a,b   Welch, James ^a  

^a ENTEGRIS INC   (United States)

^b Stiftung Caesar   (Germany)

Author keywords

H2 sensor; MEMS; Micro hotplate; Rare earth; Yttrium hydride

Indexed keywords

ELECTRIC RESISTANCE; ENERGY STORAGE; HYDRIDES; HYDROGEN; MICROELECTROMECHANICAL DEVICES; PALLADIUM; RARE EARTH ELEMENTS; THIN FILMS;

H2 SENSOR; MEMS; MICROHOTPLATE; RARE EARTH; YTTRIUM HYDRIDE;

CHEMICAL SENSORS;

EID: 33745699687     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.05.007     Document Type: Article

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