Development of micro hydrogen gas sensor with SnO2-Ag2O-PtOx composite using MEMS process

Sensors and Actuators, B: Chemical

Volumn 127, Issue 2, 2007, Pages 441-446

  Kim, Il Jin ^a   Han, Sang Do ^a   Han, Chi Hwan ^a   Gwak, Jihye ^a   Hong, Dae Ung ^b   Jakhar, Devender ^c   Singh, K C ^c   Wang, Jin Suk ^d  

^a Korea Institute of Energy Research (KIER)   (South Korea)

^b Yonsei University   (South Korea)

^c MAHARSHI DAYANAND UNIVERSITY   (India)

^d Chungnam National University   (South Korea)

Author keywords

Hydrogen gas; MEMS process; Micro sensor; SnO2 Ag2O PtOx composite

Indexed keywords

ALUMINA; HYDROGEN; MEMS; MICROSENSORS; NANOCRYSTALLINE MATERIALS; SOL-GEL PROCESS; THICK FILMS;

MEMS PROCESS; NANOCRYSTALLINE SYSTEM; WORKING TEMPERATURE;

CHEMICAL SENSORS;

EID: 35348942362     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.04.047     Document Type: Article

References (29)

1. Shukla S., Seal S., Ludwig L., and Parish C. Nanocrystalline indium oxide-doped tin oxide thin film as low temperature hydrogen sensor. Sens. Actuators B 97 (2004) 256-265
2. Dwivedi D., Dwivedi R., and Srivastava S.K. Sensing properties of palladium-gate MOS (Pd-MOS) hydrogen sensor-based on plasma grown silicon dioxide. Sens. Actuators B 71 (2000) 161-168
3. Bevenot X., Trouillet A., Veillas C., Gagnarie H., and Clement M. Hydrogen leak detection using an optical fibre sensor for aerospace applications. Sens. Actuators B 67 (2000) 57-67
4. Morrison S.R. Semiconductor gas sensors. Sens. Actuators 2 (1982) 329-341
5. Shukla S., Zhang P., Cho H.J., Rahman Z., Drake C., and Seal S. Hydrogen-discriminating nanocrystalline doped-tin-oxide room temperature microsensor. J. Appl. Phys. 98 (2005) 104306-104315
6. Gardner J.W., Varadan V.K., and Awadelkarim O.O. Micro Sensors, MEMS and Smart Devices (2001), John Wiley and Sons, New York
7. 2-based) semiconducting and for electrochemical sensors. Sens. Actuators B 66 (2000) 31-33
8. Yamazoe N. New approaches for improving semiconductor gas sensors. Sens. Actuators B 5 (1991) 7-19
9. N. Taguchi, Gas detecting element and method of manufacturing same, US Patent 3,676,820 (1972).
10. 2. Sens. Actuators B 98 (2004) 166-173
11. 2 and LPG gas sensor. Sens. Actuators B 84 (2002) 95-97
12. Yamozoe N., Kurokawa Y., and Seiyama T. Effects of additives on semiconductor gas sensors. Sens. Actuators 4 (1983) 283-289
13. 2 ceramic. Sens. Actuators B 24-25 (1995) 486-490
14. 2S detection. Chem. Lett. (1991) 575-578
15. x system. Sens. Actuators B 107 (2005) 825-830
16. Kim I.J., Han S.D., Han C.H., Gwak J., Lee H.D., and Wang J.S. Micro semiconductor CO sensors based on indium-doped tin dioxide nanocrystalline powders. Sensors 6 (2006) 526-535
17. Joint Commission on Powder Diffraction Spectroscopy card No. 21-1250, International Centre for Diffraction Data, Swarthmore, PA, 1980.
18. 2+-doped ZnS nano crystals. J. Lumin. 92 (2001) 73-78
19. 2 sensor based on intermediate hydroxy tin oxide. Sens. Actuators B (1999) 147-153
20. Hammond J.W., and Liu C.C. Silicon based microfabricated tin oxide gas sensor incorporating use of Hall effect measurement. Sens. Actuators B 81 (2001) 25-31
21. 2-based gas sensors. Sens. Actuators B 69 (2000) 144-152
22. De G., Licciulli A., Marsarao C., Quirini A., Rells R., Siciliano P., and Vasanelli L. Sol-gel derived pure and palladium activated tin oxide films for gas-sensing applications. Sens. Actuators B 55 (1999) 134-139
23. 2-based elements. Sens. Actuators B 3 (1991) 147-155
24. Wang X., Yee S.S., and Carey W.P. Transition between neck-controlled and grain boundary controlled sensitivity of metal oxide gas sensors. Sens. Actuators B 24-25 (1995) 454-457
25. Gong J., Fei W., Seal S., and Chen Q. Proceedings of SPIE, vol. 5346. SPIE, Bellingham, WA (2004)
26. 2 layer-built structure fabricated by sol-gel process. J. Electrochem. Soc. 141 (1994) 220-225
27. 2 by surface chemical modification with diethoxydimethylsilane. Sens. Actuators B 64 (2000) 175-181
28. 2 chemical gas sensors for electronic nose. Sens. Actuators B 102 (2004) 117-125
29. Berberich M.S., Zheng J.G., Weimer U., Gopel W., Barsan N., Pentia E., and Tomescu A. The effect of Pt and Pd surface doping on the response of nanocrystalline tin oxide gas sensors to CO. Sens. Actuators B 31 (1996) 71-75