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Volumn 173, Issue , 2012, Pages 377-384

A novel sol-gel thin film porous alumina based capacitive sensor for measuring trace moisture in the range of 2.5-25 ppm

Author keywords

Capacitive sensor; Moisture detector; Porous alumina; Range 2.5 25 ppm; Sol gel technique

Indexed keywords

AFM; AGILENT; BET METHOD; CAPACITANCE CHANGE; COMMERCIAL APPLICATIONS; FREQUENCY RANGES; GOLD ELECTRODES; HIGH SURFACE-TO-VOLUME RATIO; IMPEDANCE ANALYZER; LOW COSTS; MICROPORES; MOISTURE DETECTION; MOISTURE SENSORS; NANOPOROUS THIN FILMS; NON-LINEARITY; PORE MORPHOLOGY; POROUS ALUMINA; POROUS FILM; SOL-GEL TECHNIQUE; SOL-GEL THIN FILMS; TRACE MOISTURE SENSORS; XRD;

EID: 84867090000     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.07.014     Document Type: Article
Times cited : (77)

References (26)
  • 1
    • 0022813956 scopus 로고
    • Humidity sensors principle and applications
    • N. Yamazoe, and Y. Shimizu Humidity sensors principle and applications Sensors and Actuators 10 1986 379 398
    • (1986) Sensors and Actuators , vol.10 , pp. 379-398
    • Yamazoe, N.1    Shimizu, Y.2
  • 2
    • 58149325887 scopus 로고
    • Ceramic sensors for humidity detection: The state of art and future development
    • E. Traversa Ceramic sensors for humidity detection: the state of art and future development Sensors and Actuators B 23 1995 135 156
    • (1995) Sensors and Actuators B , vol.23 , pp. 135-156
    • Traversa, E.1
  • 3
    • 49549096459 scopus 로고    scopus 로고
    • Zeolite based trace humidity sensor for high temperature applications in hydrogen atmosphere
    • S. Neumeier, T. Echterhof, R. Olling, H. Pfeifer, and U. Simona Zeolite based trace humidity sensor for high temperature applications in hydrogen atmosphere Sensors and Actuators B 134 2008 171 174
    • (2008) Sensors and Actuators B , vol.134 , pp. 171-174
    • Neumeier, S.1    Echterhof, T.2    Olling, R.3    Pfeifer, H.4    Simona, U.5
  • 5
    • 33646554517 scopus 로고    scopus 로고
    • Humidity sensors: A review of materials and mechanisms
    • Z. Chen, and C. Lu Humidity sensors: a review of materials and mechanisms Sensor Letters 3 2005 274 295
    • (2005) Sensor Letters , vol.3 , pp. 274-295
    • Chen, Z.1    Lu, C.2
  • 6
    • 84867054401 scopus 로고    scopus 로고
    • Honeywell, 1985 Douglas Drive North Golden Valley, MN 55422
    • Data sheet: Honneywell Sensing and Control, Honeywell, 1985 Douglas Drive North Golden Valley, MN 55422 www.honeywell.com/sensing.
    • Data Sheet: Honneywell Sensing and Control
  • 7
    • 84867034043 scopus 로고    scopus 로고
    • 84F Horseblock Road, Yaphank, NY 11980, USA
    • Data sheet: Xentaur Corporation (84F Horseblock Road, Yaphank, NY 11980, USA) (www.xentaur.com).
    • Data Sheet: Xentaur Corporation
  • 8
    • 84867054404 scopus 로고    scopus 로고
    • SHAW Moisture Meters [UK] Ltd., Westgate Bradford, BD13SQ
    • SHAW Moisture Meters [UK] Ltd., Westgate Bradford, BD13SQ (www.shawmeters.com).
  • 11
    • 37548999783 scopus 로고    scopus 로고
    • Development of commercial nanoporous trace moisture sensor following sol-gel thin film technique
    • D.D. Saha, S. Das, and K. Sengupta Development of commercial nanoporous trace moisture sensor following sol-gel thin film technique Sensors and Actuators B 128 2008 383 387
    • (2008) Sensors and Actuators B , vol.128 , pp. 383-387
    • Saha, D.D.1    Das, S.2    Sengupta, K.3
  • 12
    • 33748026777 scopus 로고    scopus 로고
    • Micromachinised water vapor sensor, a review of sensing technologies
    • R. Fenner, and E. Zdankiewicz Micromachinised water vapor sensor, a review of sensing technologies IEEE Sensors Journal 1 4 2001 309 317
    • (2001) IEEE Sensors Journal , vol.1 , Issue.4 , pp. 309-317
    • Fenner, R.1    Zdankiewicz, E.2
  • 15
    • 0033879406 scopus 로고    scopus 로고
    • Study of the performance degradation of thin film aluminum oxide sensor at high humidity
    • R.K. Nahar Study of the performance degradation of thin film aluminum oxide sensor at high humidity Sensors and Actuators B 63 2000 49 54
    • (2000) Sensors and Actuators B , vol.63 , pp. 49-54
    • Nahar, R.K.1
  • 19
    • 33847175152 scopus 로고    scopus 로고
    • Sol-gel fabrication of compact, crack free alumina film
    • C. Jing, X. Zhao, and Y. Zhang Sol-gel fabrication of compact, crack free alumina film Materials Research Bulletin 42 2007 600 608
    • (2007) Materials Research Bulletin , vol.42 , pp. 600-608
    • Jing, C.1    Zhao, X.2    Zhang, Y.3
  • 20
    • 0016485640 scopus 로고
    • Alumina sol preparation from alkoxide
    • B.E. Yoldas Alumina sol preparation from alkoxide Ceramic Bulletin Science 54 3 1975 289 290
    • (1975) Ceramic Bulletin Science , vol.54 , Issue.3 , pp. 289-290
    • Yoldas, B.E.1
  • 22
  • 24
    • 0037199620 scopus 로고    scopus 로고
    • Pore size optimization of humidity sensor - A probabilistic approach
    • G. Banerjee, and K. Sengupta Pore size optimization of humidity sensor - a probabilistic approach Sensors and Actuators B 86 2002 34 41
    • (2002) Sensors and Actuators B , vol.86 , pp. 34-41
    • Banerjee, G.1    Sengupta, K.2
  • 25
    • 0021422233 scopus 로고
    • Effect of moisture on the dielectric properties of porous alumina films
    • V.K. Khanna, and R.K. Nahar Effect of moisture on the dielectric properties of porous alumina films Sensors and Actuators 5 1984 187 190
    • (1984) Sensors and Actuators , vol.5 , pp. 187-190
    • Khanna, V.K.1    Nahar, R.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.