A medium-range hygrometer using nano-porous thin film of γ-Al 2O 3 with electronics phase detection

IEEE Sensors Journal

Volumn 12, Issue 5, 2012, Pages 1625-1632

  Kumar, Lokesh ^a   Saha, Debdulal ^b   Khan, Shakeb A ^a   Sengupta, Kamalendu ^a   Islam, Tarikul ^a  

^a JAMIA MILLIA ISLAMIA CENTRAL UNIVERSITY   (India)

^b CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

Author keywords

Capacitive sensor; dip coating; parallel electrode; porous alumina; prototype RH meter; sol gel science

Indexed keywords

AGILENT 4294A IMPEDANCE ANALYZER; BET ANALYSIS; CAPACITANCE CHANGE; COMMERCIAL SENSORS; DIP COATING; ELECTRICAL PARAMETER; FUNCTION GENERATION; GOLD ELECTRODES; NANO-POROUS; PARALLEL ELECTRODES; PHASE DETECTION; PORE MORPHOLOGY; POROUS ALUMINA; POROUS THIN FILMS; PROTOTYPE INSTRUMENT; SIGNAL CONDITION; SOL SOLUTIONS; VOLTAGE SIGNALS; XRD;

SENSORS; SOL-GEL PROCESS; SOL-GELS; THIN FILMS;

CAPACITIVE SENSORS;

EID: 84860161150     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2172979     Document Type: Article

References (20)

1. Z. Chen and C. Lu, "Humidity sensors: A review of materials and mechanisms," Sensor Lett., vol. 3, pp. 274-295, 2005.
2. N. Yamazoe and Y. Shimizu, "Humidity sensors principle and applications," Sens. Actuators, vol. 10, pp. 379-398, 1986.
3. Data Sheet. Yaphank, NY, Xentaur Corporation [Online]. Available: www.xentaur.com
4. Len ShawBuilding, Bolton Lane Bradford, SHAWMoisture Meters [UK] Ltd. [Online]. Available: www.shawmeters.com
5. Z. M. Rittersma, "Recent achievements in miniaturized humidity sensors-A review of ansduction techniques," Sens. Actuators A, Phys., vol. 96, pp. 196-210, 2002. (Pubitemid 34247345)
6. E. Traversa, "Ceramic sensors for humidity detection: The state of art and future development," Sens. Actuators B, vol. 23, pp. 135-156, 1995.
7. 3 thick film template as sensitive capacitive trace moisture sensor," Sens. Actuators B, vol. 106, pp. 258-262, 2005. (Pubitemid 40480252)
8. Y. Y. Qiu, C. Azeredo-Leme, L. R. Alcacer, and J. E. Franca, "A CMOS humidity sensor with on chip calibration," Sens. Actuators A, Phys., vol. 92, pp. 80-87, 2001. (Pubitemid 32704861)
9. E. J. Connolly, H. T. M. Pham, J. Groeneweg, P. M. Sarro, and P. J. French, "Relative humidity sensors using porous SiC membranes and Al electrodes," Sens, Actuators B, vol. 100, pp. 216-220, 2004.
10. Z. M. Rittersma et al., "A novel surface micromachined capacitive porous silicon humidity sensor," Sens. Actuators B, vol. 68, pp. 210-217, 2000.
11. D. Saha, S. Das, and K. Sengupta, "Development of commercial nanoporous trace moisture sensor following sol-gel thin film technique," Sens. Actuators B, vol. 128, pp. 383-387, 2008.
12. O. K. Varghese, D. Gong, M. Paulose, K. G. Ong, C. A. Grimes, and E. C. Dickey, "Highly ordered nanoporous alumina films: Effect of pore size and uniformity on sensing performance," J. Mater. Res., vol. 17, no. 5, pp. 1162-1171, 2002. (Pubitemid 34648287)
13. 3 coated porous silicon for low ppmV trace moisture detection," IEEE Sensors J., vol. 11, no. 4, pp. 882-887, Apr. 2011.
14. B. E. Yoldas, "A transparent porous alumina," American Ceramic Soc. Bull, vol. 54, no. 3, pp. 286-288, 1975.
15. 3," J. Mater. Sci., vol. 10, pp. 1856-1861, 1975.
16. C. Jing, X. Zhao, and Y. Zhang, "Sol-gel fabrication of compact, crack free alumina film," Mater. Res. Bull., vol. 42, pp. 600-608, 2007.
17. 3 nanopowders obtained by opolymeric precursor," Mater. Chemistry Phys., vol. 103, pp. 394-399, 2007. (Pubitemid 46795442)
18. R. Coelho, Physics of Dielectrics. Amsterdam, The Netherlands: Elsevier, 1979.
19. S. Brunauer, L. S. Deming, W. S. Deming, and E. Teller, "On a theory of the vander waals absorpsion, of gases," J. Amer. Chem. Soc., vol. 62, pp. 1723-1732, 1940.
20. Doeblin, Measurement System and Design. New York: McGraw-Hill, 2002.