Development of commercial nanoporous trace moisture sensor following sol-gel thin film technique

Sensors and Actuators, B: Chemical

Volumn 128, Issue 2, 2008, Pages 383-387

  Saha, Debdulal ^a   Das, Santanu ^b   Sengupta, Kamalendu ^a  

^a CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

^b NATIONAL METALLURGICAL LABORATORY   (India)

Author keywords

Al sec butoxide; Electrical properties; Morphologic analysis; Sol gel coating; Transparent thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SOL-GELS; SURFACE ROUGHNESS; THIN FILMS;

AL-SEC-BUTOXIDE; MORPHOLOGIC ANALYSIS; SOL-GEL COATINGS; TRANSPARENT THIN FILMS;

HUMIDITY SENSORS;

EID: 37548999783     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.06.024     Document Type: Article

References (30)

1. Seiyama T., Yamazoe N., and Arai H. Ceramic humidity sensors. Sens. Actuators 4 (1983) 85-96
2. Ichinose N. Electronic ceramics for sensors. Am. Ceram. Soc. Bull. 64 (1985) 1581-1585
3. Fagan J.G., and Amarakoon V.R.W. Relative and reproducibility of ceramic sensor. Part III. Am. Cream. Soc. Bull. 72 (1993) 119-130
4. IIer R.K. The Chemistry of Silica (1979), Wiley & Sons, Inc., New York
5. Brinker C.J., and Schere G.W. Sol-Gel Science (1990), Academic Press, Inc., Boston
6. Piere A.C. In: Uhlmann D.R., and Ulrich D.R. (Eds). Ultrastructure Processing of Advance Materials (1992), Wiley & Sons, Inc., New York 103-110
7. Shoup R.D. In: Mackenzie J.D., and Ulrich D.R. (Eds). Ultrastructure Processing of Advanced Ceramics (1988), Wiley & Sons, Inc., New York 347-354
8. Anderson K.R., Dent-Glasser L.S., and Smith D.N. In: Falcones J.S. (Ed). ACS Symposium Series 194, Soluble Silicate (1982) 115-131
9. Sherer G.W. Recent progress in drying of gels. J. Non-Cryst. Solids 147-148 (1992) 363-374
10. Sarkar A., Choudhury S.R., Wang S., Kirkbir F., and Murata H. Drying of alkoxide gels observation of an alternate phenomenology. J. Sol-Gel Sci. Technol. 2 (1994) 865-870
11. Bagwell R.B., and Messing G.L. Critical factors in the production of sol-gel derived porous alumina. Key Eng. Mater. 115 (1996) 45-64
12. Hench L.L., and Nogues J.L. In: Klein L.C. (Ed). Sol-Gel Optics (1994), Kluwer Academic Publishers, Boston 59-81
13. In: Klein L.C. (Ed). Sol-Gel Technology (1988), Noyes Publishing, Park Ridge, NJ
14. Yoldas B.E. A transparent porous alumina. J. Mater. Sci. 10 (1975) 1856-1861
15. Hasanye G. Polymer Films in Sensor Applications (1995), Technomic Publishing Company, Budapest
16. Sadaoka Y., Matsugachi M., Sakai Y., and Takhasghi K. Effects of sorbed water on the dielectric constant of some cellulose thin films. J. Mater. Sci. Lett. 7 (1988) 121-124
17. Roman C., Boden O., Prodan N., Levi A., Cords E., and Manoviciu I. A capacitive type humidity sensor using crosslinked poly (methyl methacrylate-co(2-hydroxypropyl)-methylacrylate). Sens. Actuators B 24-25 (1995) 710-713
18. Ralsstobn A.R.K., Klein C.F., Thome P.E., and Denton D.D. A model for the relative environmental stability of series of polyimide capacitive humidity sensors. Sens. Actuators B 22 (1994) 139-147
19. In: Saikia Y., and Seiyama T. (Eds). Chemical Sensor Technology vol. 2 (1989), Kodansha, Elsevier, Tokyo
20. Waisin-Neilson P., and Neilson R.H. Poly(dimethyl phosphazene) and poly (methylphosphazene). Inorg. Synth. 25 (1989) 69-72
21. Neilson R.H., Hani R., Wisian-Neilson P., Meister J.J., Roy A.K., and Hangaur G.L. Synthesis and characterization of poly(alkyl/arylphosphazenes). Macromolecule 20 (1987) 910-916
22. Basu S., Saha M., Chatterjee S., Mistry K.K., Bandhyapadhyay S., and Sengupta K. Porous ceramic sensor for measurement of gas moisture sensor in the ppm range. Mater. Lett. 49 (2001) 29-33
23. v level).
24. Basu S., Chatterjee S., Saha M., Bandhyapadhyay S., Mistry K.K., and Sengupta K. Study of electrical characteristics of porous alumina sensors for detection of low moisture in gases. Sens. Actuators B 79 (2001) 182-186
25. Varghese O.K., Paulose M., Ong K.G., Gong D., and Dickey E.C. Highly ordered nanoporous alumina films: effect of pore size and uniformity on sensing performance. J. Mater. Res. 17 (2002) 1162-1171
26. Agrafiots C., and Tsetsekou A. Deposition of meso porous γ-alumina coating on ceramic honeycombs by sol-gel methods. J. Eur. Ceram. Soc. 22 (2002) 423-434
27. Chatterjee S., Chattopadhyay D., Basu S., Mistry K.K., and Sengupta K. Humidity sensors using porous tape cast alumina substrate. Rev. Sci. Inst. 72 (2001) 2792-2795
28. K. Nemoto, S. Chaturvedi, K. Hara, Humidity sensors using anodized films with surface modifications, Tech. Report of I.E.I.E.C.E., OME 96-25 C.P.M. 96-38, 1996-2006.
29. Rittersma Z.M., Splinter A., Bodecker A., and Benecke W. A noval surface-micromachined capacitive porous silicon humidity sensor. Sens. Actuators B 68 (2000) 210-217
30. Islam T., Mistry K.K., Sengupta K., and Saha H. Measurement of gas moisture in ppm range using porous silicon and porous alumina sensor. Sens. Mater. Jpn. 16 (2004) 345-356