Nerve agent simulant detection by solidly mounted resonators (SMRs) polymer coated using laser induced forward transfer (LIFT) technique

Sensors and Actuators, B: Chemical

Volumn 173, Issue , 2012, Pages 32-39

  Cannata D ^a   Benetti, M ^a   Di Pietrantonio, F ^a   Verona, E ^a   Palla Papavlu, A ^b   Dinca, V ^b   Dinescu, M ^b   Lippert, T ^c  

^a CNR   (Italy)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

DMMP; Electro acoustic sensor; Gas sensor; LIFT; Polymer deposition; Solidly mounted resonator

Indexed keywords

DIMETHYL METHYLPHOSPHONATE; DMMP; ELECTRO-ACOUSTIC; FILM BULK ACOUSTIC RESONATORS; LASER-INDUCED FORWARD TRANSFER; METAL ELECTRODES; NERVE AGENTS; POLYEPICHLOROHYDRIN; POLYETHYLENEIMINE; POLYISOBUTYLENES; POLYMER DEPOSITION; POLYMER MATERIALS; POLYMER-COATED SENSORS; PROCESS EFFICIENCY; RELEASE LAYER; SENSITIVE LAYERS; SENSITIVE POLYMERS; SILICON SUBSTRATES; SOLIDLY MOUNTED RESONATOR; TRIAZENE POLYMERS;

ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; ALUMINUM; ALUMINUM NITRIDE; CHEMICAL SENSORS; DEPOSITS; INTERFACES (MATERIALS); LIFT; POLYMERS; REACTION KINETICS; RESONATORS;

PLASTIC COATINGS;

EID: 84867034972     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.04.061     Document Type: Article

References (36)

1. D.S. Ballantine, R.M. White, S.J. Martin, A.J. Ricco, G.C. Frye, E.T. Zellers, and H. Wohltjen Acoustic Wave Sensors: Theory, Design and Physico-Chemical Applications 1997 John Wiley & Sons New York
2. M. Benetti, D. Cannatà, F. Di Pietrantonio, V. Foglietti, and E. Verona Microbalance chemical sensor based on thin-film bulk acoustic wave resonators Applied Physics Letters 87 2005
3. M. Penza, P. Aversa, G. Cassano, D. Suriano, W. Wiodarski, M. Benetti, D. Cannata, F. Di Pietrantonio, and E. Verona Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes IEEE Transactions on Electron Devices 55 2008 1237 1243
4. W.E. Newell Face-mounted piezoelectric resonators Proceedings of the IEEE 53 1965 575 581
5. K.M. Lakin, G.R. Kline, and K.T. McCarron Development of miniature filters for wireless applications IEEE Transactions on Microwave Theory and Techniques 43 1995 2933 2939
6. M. Benetti, D. Cannatà, A. D'Amico, F. Di Pietrantonio, V. Foglietti, and E. Verona Thin film bulk acoustic wave resonator (TFBAR) gas sensor IEEE Ultrasonics Symp. Proc. Montréal (Canada) 2004 pp. 1581-1584
7. G. Wingqvist, J. Bjurstrom, L. Liljeholm, I. Katardjiev, and A.L. Spetz Shear mode AlN thin film electroacoustic resonator for biosensor applications IEEE Sensors, 2005 2005 p. 4
8. J. Weber, W.M. Albers, J. Tuppurainen, M. Link, R. Gabl, W. Wersing, and M. Schreiter Shear mode FBARs as highly sensitive liquid biosensors Sensors and Actuators A: Physical 128 2006 84 88
9. J.W. Grate, S.J. Martin, and R.M. White Acoustic wave microsensors Analytical Chemistry A 65 1993 940 947
10. J.W. Grate, S.J. Martin, and R.M. White Acoustic wave microsensors Analytical Chemistry A 65 1993 987 996
11. H. Zhang, W. Pang, M.S. Marma, C.-Y. Lee, S. Kamal-Bahl, E.S. Kim, and C.E. McKenna Label-free detection of protein-ligand interactions in real time using micromachined bulk acoustic resonators Applied Physics Letters 96 2010 123702 123703
12. 2+/11- mercaptoundecanoic acid bilayer Sensors and Actuators B: Chemical 150 2010 483 486
13. J. Bohandy, B.F. Kim, F.J. Adrian, and A.N. Jette Metal deposition at 532 nm using a laser transfer technique Journal of Applied Physics 63 1988 1538
14. D.B. Chrisey The power of direct writing Science 289 2000 879 881
15. A. Klini, A. Mourka, V. Dinca, C. Fotakis, and F. Claeyssens ZnO nanorod micropatterning via laser-induced forward transfer Applied Physics A: Materials Science & Processing 87 2007 17 22
16. H. Bai, and G. Shi Gas sensors based on conducting polymers Sensors 7 2007 267 307
17. K.M. Lakin, K.T. McCarron, and R.E. Rose Solidly mounted resonators and filters IEEE Proceedings 1995, Ultrasonics Symposium. vol. 902 1995 pp. 905-908
18. C.-J. Chung, Y.-C. Chen, C.-C. Cheng, and K.-S. Kao Fabrication and frequency response of solidly mounted resonators with 1/4λmode configuration Thin Solid Films 516 2008 5277 5281
19. D. Royer, and E. Dieulesaint Piezoelectric Transcucers for Bulk Waves in: Elastic Waves in Solids 2000 Springer-Verlag Berlin, Heidelberg, New York pp. 10-15
20. K. Nakamura, and H. Kanbara Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International 1998 pp. 876-881
21. 3 and AlN/Si IEEE Ultrasonics Symposium Proc. Chigago (IL) 1981 pp. 375-380
22. A.J. Slobodnik, E.D. Conway, and R.T. Delmonico Microwave Acoustics Handbook 1973 Air Force Cambridge Research Laboratories Massachusett
23. F.H. Featherston, and J.R. Neighbours Elastic constant of tantalum, tungsten, and molybdenum Physical Review 130 1963 1324 1333
24. K.M. Lakin, J. Belsick, J.F. McDonald, and K.T. McCarron Improved bulk wave resonator coupling coefficient for wide bandwidth filters, in: IEEE Ultrasonics Symposium, 2001, vol. 821 2001 pp. 827-831
25. B. Paci, A. Generosi, V. Rossi Albertini, M. Benetti, D. Cannatà, F. Di Pietrantonio, and E. Verona A study of highly c-axis oriented AlN films for diamond-based surface acoustic wave devices: Bulk structure and surface morphology Sensors & Actuators: A Physical 137 2007 279 286
26. A.K. Diallo, L. Rapp, S. Nénon, A.P. Alloncle, P. Delaporte, F. Fages, and C. Videlot-Ackermann Top gate copper phthalocyanine thin film transistors with laser-printed dielectric Synthetic Metals 161 2011 888 893
27. V. Dinca, A. Palla-Papavlu, M. Dinescu, J.S. Stewart, T.K. Lippert, F. Di Pietrantonio, D. Cannata, M. Benetti, and E. Verona Polymer pixel enhancement by laser-induced forward transfer for sensor applications Applied Physics A 101 2010 559 565
28. V. Dinca, A.P. Papavlu, A. Matei, C. Luculescu, M. Dinescu, T. Lippert, F. Di Pietrantonio, D. Cannata, M. Benetti, and E. Verona A comparative study of DRL-lift and lift on integrated polyisobutylene polymer matrices Applied Physics A 101 2010 429 434
29. T. Lippert Laser applications of polymers T. Lippert, Polymers and Light, Advanced Polymer Science 2004 pp. 51-246
30. M. Nagel, R. Hany, T. Lippert, M. Molberg, F.A. Nüesch, and D. Rentsch Aryltriazene photopolymers for UV-laser applications: improved synthesis and photodecomposition study Macromolecular Chemistry and Physics 208 2007 277 286
31. A. Palla-Papavlu, V. Dinca, M. Dinescu, F. Di Pietrantonio, D. Cannatà, M. Benetti, and E. Verona Matrix-assisted pulsed laser evaporation of chemoselective polymers Applied Physics A: Materials Science & Processing 105 2011 651 659
32. A. Palla-Papavlu, V. Dinca, C. Luculescu, J. Shaw-Stewart, M. Nagel, T. Lippert, and M. Dinescu Laser induced forward transfer of soft materials Journal of Optics 12 2010 124014
33. G. Sauerbrey Verwendung von schwingquarzen zur wägung dunner schichten und zur mikrowägung Zeitschrift fur Physikalische 155 1959 206 222
34. P. Lostis Review in Optical Theory and Instruments 38 1959
35. T.E. Mlsna, S. Cemalovic, M. Warburton, S.T. Hobson, D.A. Mlsna, and S.V. Patel Chemicapacitive microsensors for chemical warfare agent and toxic industrial chemical detection Sensors and Actuators B: Chemical 116 2006 192 201
36. Z. Ying, Y. Jiang, X. Du, G. Xie, J. Yu, and H. Tai Polymer coated sensor array based on quartz crystal microbalance for chemical agent analysis European Polymer Journal 44 2008 1157 1164