Tribological properties of metal doped a-C film by RF magnetron sputtering method

Materials Research Bulletin

Volumn 47, Issue 10, 2012, Pages 2784-2787

  Park, Yong Seob ^a   Jung, Tae Hwan ^b   Lim, Dong Gun ^b   Park, Young ^c   Kim, Hyungchul ^c   Choi, Won Seok ^d  

^a Chosun College of Science and Technology   (South Korea)

^b Chungju National University   (South Korea)

^c Korea Railroad Research Institute   (South Korea)

^d Hanbat National University   (South Korea)

Author keywords

A. Amorphous materials; A. Carbides; B. Sputtering; C. Atomic force microscopy; D. Mechanical properties

Indexed keywords

A-C FILM; CARBON MATRIX; COEFFICIENT OF FRICTIONS; CRITICAL LOAD; MAXIMUM HARDNESS; METAL BONDING; METAL-DOPED; METAL-DOPED AMORPHOUS CARBON; RADIO-FREQUENCY (RF) MAGNETRON; RF MAGNETRON SPUTTERING METHOD; SPUTTERING YIELDS; TRIBOLOGICAL CHARACTERISTICS; TRIBOLOGICAL PROPERTIES;

AMORPHOUS CARBON; ATOMIC FORCE MICROSCOPY; CARBIDES; CHROMIUM; HARDNESS; MAGNETRON SPUTTERING; METALS; MOLYBDENUM; SEMICONDUCTOR DOPING; SURFACE ROUGHNESS; TRIBOLOGY;

TUNGSTEN;

EID: 84866323462     PISSN: 00255408     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.materresbull.2012.04.142     Document Type: Conference Paper

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