Hierarchical structures of carbon nanotubes and arrays of chromium-capped silicon nanopillars: Formation and electrical properties

Chemistry - A European Journal

Volumn 18, Issue 37, 2012, Pages 11614-11620

  Koch, Stefan ^a   Joshi, Ravi K ^b   Noyong, Michael ^a   Timper, Jan ^a   Schneider, Jörg J ^b   Simon, Ulrich ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

chemical vapor deposition; chromium; nanopillars; nanotubes; silicon

Indexed keywords

CARBON SOURCE; ETCHING MASKS; EX SITU; GAS FLOWRATE; HIERARCHICAL SEQUENCES; HIERARCHICAL STRUCTURES; IN-SITU; MACROSCOPIC MEASUREMENTS; METALLIC CHROMIUM; NANO SPHERE LITHOGRAPHY; NANOPILLARS; NUCLEATION SITES; SEMICONDUCTOR PROPERTIES; SI-BASED; STRUCTURAL SIZE;

CARBON; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; CHROMIUM; COBALT; ETHANOL; ETHYLENE; METHANE; NANOSTRUCTURES; NANOTUBES; SILICON; VAPORS;

ELECTRIC PROPERTIES;

CARBON NANOTUBE; CHROMIUM; NANOMATERIAL; SILICON;

ARTICLE; CHEMICAL STRUCTURE; CHEMISTRY; IMPEDANCE; SEMICONDUCTOR;

CHROMIUM; ELECTRIC IMPEDANCE; MOLECULAR STRUCTURE; NANOSTRUCTURES; NANOTUBES, CARBON; SEMICONDUCTORS; SILICON;

EID: 84865793056     PISSN: 09476539     EISSN: 15213765     Source Type: Journal    
DOI: 10.1002/chem.201201170     Document Type: Article

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