Flexible PVDF-TrFE pyroelectric sensor driven by polysilicon thin film transistor fabricated on ultra-thin polyimide substrate

Sensors and Actuators, A: Physical

Volumn 185, Issue , 2012, Pages 39-43

  Pecora, A ^a   Maiolo, L ^a   Maita, F ^a   Minotti, A ^a  

^a CNR   (Italy)

Author keywords

Flexible sensor; Polysilicon TFT; PVDF TrFE; Pyroelectric polymer; Ultra thin polyimide

Indexed keywords

ACTIVE SENSOR; BOTTOM CONTACTS; FLEXIBLE SENSOR; HE-NE LASERS; LOAD RESISTANCES; LOW TEMPERATURE POLY-SILICON; MAXIMUM POWER; N-CHANNEL; OUTPUT SIGNAL; POLYIMIDE FILM; POLYIMIDE SUBSTRATE; POLYSILICON THIN FILM TRANSISTORS; PVDF-TRFE; PYROELECTRIC POLYMERS; PYROELECTRIC PROPERTIES; PYROELECTRIC SENSORS; SENSOR CAPACITANCE; ULTRA-THIN; WORKING FREQUENCY;

CAPACITORS; FIELD EFFECT TRANSISTORS; INFRARED RADIATION; POLYIMIDES; POLYMERIC FILMS; POLYSILICON; THIN FILM TRANSISTORS;

SENSORS;

EID: 84865609928     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.07.013     Document Type: Article

References (18)

1. H. Kawai The piezoelectricity of polyvinylidene fluoride Japanese Journal of Applied Physics 8 1969 975 976
2. B. Ploss, and A. Domig Static and dynamic pyroelectric properties of PVDF Ferroelectrics 159 1994 263 268
3. A. Odon Probe with PVDF sensor for energy measurements of optical radiation Measurement Science Review 3 Section 3 2003 111 114
4. D. Setiadi, P.M. Sarro, and P.P.L. Regtien A 3 × 1 integrated pyroelectric sensor based on VDF/TrFE copolymer Sensors and Actuators A 52 1996 103 109 (Pubitemid 126346954)
5. R.S. Dahiya, G. Metta, M. Valle, A. Adami, and L. Lorenzelli Piezoelectric oxide semiconductor field effect transistor touch sensing devices Applied Physics Letters 95 2009 034105-034105-3
6. A. Adami, R.S. Dahiya, C. Collini, D. Cattin, L. Lorenzelli, POSFET touch sensor with CMOS integrated signal conditioning electronics, Sensors and Actuators A, in press.
7. I. Graz, M. Kaltenbrunner, C. Keplinger, R. Schwodiauer, S. Bauer, S.P. Lacour, and S. Wagner Flexible ferroelectret field-effect transistor for large-area sensor skins and microphones Applied Physics Letters 89 2006 073501 073503
8. M. Zirkl, G. Scheipl, B. Stadlober, A. Haase, G. Jakopic, J.R. Krenn, A. Sawatdee, P. Bodo, and P. Andersson Fully printable, flexible, large area organic optothermal sensors for human-machine-interfaces Proceedings of IEEE Sensors 2009 1628 1631 (art. no. 5398503)
9. T. Someya, T. Sekitani, S. Iba, Y. Kato, H. Kawaguchi, and T. Sakurai A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications Proceedings of National Academy of Sciences 101 2004 9966 9970 (Pubitemid 38891179)
10. A. Pecora, L. Maiolo, M. Cuscun, D. Simeone, A. Minotti, L. Mariucci, and G. Fortunato Solid State Electronics 52 2008 348 352
11. F. Lemmi, W. Chung, S. Lin, P.M. Smith, T. Sasagawa, B.C. Drews, A. Hua, J.R. Stern, and J.Y. Chen IEEE Electron Device Letters 25 2005 486 488
12. E. Zampetti, L. Maiolo, A. Pecora, F. Maita, S. Pantalei, A. Minotti, A. Valletta, M. Cuscun, A. Macagnano, G. Fortunato, and A. Bearzotti Sensors and Actuators B 155 2011 768 774
13. R.S. Dahiya, M. Valle, L. Lorenzelli, G. Metta, and S. Pedrotti Deposition, processing and characterization of PVDF-TrFE thin films for sensing applications IEEE Sensors 2008 Conference 2008 490 493
14. A. Schmitz, M. Maggiali, L. Natale, and G. Metta Touch sensors for humanoid hands 19th IEEE International Symposium on Robot and Human Interactive Communication Viareggio (Italy), September 12-15 2010
15. L.F. Brown, and A.M. Fowler High vinylidene-fluoride content P(VDF-TrFE) films for ultrasound transducers 1998 IEEE Ultrasonics Symposium 1998 607 610
16. R. Das, P. Harrop, Printed, Organic & Flexible Electronics Forecasts, Players & Opportunities 2011-2021, IDTechEx, 2011.
17. V. Privitera, S. Scalese, A. La Magna, A. Pecora, M. Cuscun, L. Maiolo, A. Minotti, D. Simeone, L. Mariucci, G. Fortunato, L. Caristia, F. Mangano, S. Di Marco, M. Camalleri, S. Ravesi, S. Coffa, M.G. Grimaldi, R. De Bastiani, P. Badal, and S. Bagiante Low-temperature annealing combined with laser crystallization for polycrystalline silicon TFTs on polymeric substrate Journal of the Electrochemical Society 155 10 2008 H764 H770
18. L. Maiolo, M. Cuscun, L. Mariucci, A. Minotti, A. Pecora, D. Simeone, A. Valletta, and G. Fortunato Analysis of self-heating related instability in n-channel polysilicon thin film transistors fabricated on polyimide Thin Solid Films 517 2009 6371 6374