Deposition, processing and characterization of P(VDFTrFE) thin films for sensing applications

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 490-493

  Dahiya, Ravinder S ^a,b   Valle, Maurizio ^a   Metta, Giorgio ^a,b   Lorenzelli, Leandro ^c   Pedrotti, Severino ^c  

^a UNIVERSITY OF GENOA   (Italy)

^b ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^c FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION OF; DRY-ETCH; IN-SITU; POLYVINYLIDENE FLUORIDES; SELECTIVE ETCHING; SENSING APPLICATIONS; SI WAFER; STANDARD METHOD; TRIFLUOROETHYLENE; WAFER LEVEL;

PLASMA ETCHING; PLASTIC FILMS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON WAFERS;

POLYMER FILMS;

EID: 67649949750     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716484     Document Type: Conference Paper

References (13)

1. R. S. Dahiya, M. Valle, G. Metta, L. Lorenzelli, and C. Collini, "Tactile Sensor Arrays for Humanoid Robot," presented at IEEE PRIME'07, The 3rd Int. Conf. on PhD Research in Microelectronics and Electronics, Bordeaux, France, July, 2007.
2. R. S. Dahiya, M. Valle, G. Metta, and L. Lorenzelli, "POSFET Based Tactile Sensor Arrays," presented at IEEE ICECS'07, The 14th Int. Conf. on Electronics, Circuits and Sys., Marrakech, Morocco, 2007.
3. http://www.robotcub.org/.
4. H. S. Nalwa, "Ferroelectric Polymers - Chemistry, Physics and Applications." New York: Marcel Dekker Inc., 1995.
5. R. G. Swartz and J. D. Plummer, "Integrated silicon-PVF2 acoustic transducer arrays," IEEE tran. on Electron Devices, vol.26, pp. 1920- 1932, 1979.
6. E. S. Kolesar, C. S. Dyson, R. R. Reston, R. C. Fitch, D. G. Ford, and S. D. Nelms, "Tactile Integrated Circuit Sensor Realized with a Piezoelectric Polymer," presented at 8th IEEE Int. Conf. on Innovative Systems in Silicon, Austin, TX, USA, 1996.
7. D. Setaidi, P. P. L. Regtien, and P. M. Sarro, "Application of VDF/TrFE copolymer for pyroelectric image sensors," Sensors and Actuators A, vol.41-42, pp. 585-592, 1994.
8. M. Akcan and C. Topacli, "Pyroelectric and dielectric properties of spin-coated thin films of vinylidene fluoride-trifluoroethylene copolymers," Polymer International, vol.50, pp. 835-840, 2001. (Pubitemid 32621054)
9. E. Edqvist, N. Snis, and S. Johansson, "Gentle dry etching of p(VDFTrFE) multilayer micro actuator structures by use of an inductive coupled plasma," J. of Micromechanics and Microengineering, vol.18, pp. 1-7, 2008.
10. M. Z. Sleca, R. D. Briggs, and W. D. Hunt, "A micromachined Poly(vinylidene fluoride-trifluoroethylene)Transducer for Pulse-Echo Ultrasound Applications," IEEE Tran. on Ultrasonics, ferroelectrics and frequency control, vol.43, pp. 257-262, 1996. (Pubitemid 126781014)
11. A. S. Fiorillo, J. V. D. Spiegel, P. E. Bloomfield, and D. Esmail- Zandi, "A P(VDF-TrFE) based Integrated Ultrasonic Transducer," Sensors and Actuators A, vol.A21-A23, pp. 719-725, 1990. (Pubitemid 20699611)
12. B. Gross, M. Gerhard, A. Berraissoul, and G. M. Sessler, "Electronbeam poling of piezoelectric polymer electrets," J. of Applied Physics, vol.62, pp. 1429-1432, 1987.
13. D. Setaidi, T. D. Binnie, P. P. L. Regtien, and M. Wubbenhorst, "Poling of VDF/TrFE copolymers using a step-wise method," presented at 9th Int. Sym. on Electrets, Shanghai, China, 1996.