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Volumn 98, Issue , 2012, Pages 374-377
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E-beam nano-patterning for the ordered growth of GaN/InGaN nanorods
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Author keywords
E beam lithography; Nitride nanorods; Ordered growth
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Indexed keywords
CRYSTAL QUALITIES;
E-BEAM LITHOGRAPHY;
GAN SUBSTRATE;
GAN/INGAN;
HIGH QUALITY;
MASK PATTERNING;
NANOHOLES;
NANOPATTERNING;
ORDERED ARRAY;
ORDERED GROWTH;
PHOTOLUMINESCENCE MEASUREMENTS;
PLASMA-ASSISTED MOLECULAR BEAM EPITAXY;
ELECTRON BEAM LITHOGRAPHY;
GALLIUM NITRIDE;
MOLECULAR BEAM EPITAXY;
OPTICAL PROPERTIES;
TITANIUM;
TRANSMISSION ELECTRON MICROSCOPY;
NANORODS;
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EID: 84865589360
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2012.07.024 Document Type: Conference Paper |
Times cited : (5)
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References (13)
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