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Volumn 98, Issue , 2012, Pages 374-377

E-beam nano-patterning for the ordered growth of GaN/InGaN nanorods

Author keywords

E beam lithography; Nitride nanorods; Ordered growth

Indexed keywords

CRYSTAL QUALITIES; E-BEAM LITHOGRAPHY; GAN SUBSTRATE; GAN/INGAN; HIGH QUALITY; MASK PATTERNING; NANOHOLES; NANOPATTERNING; ORDERED ARRAY; ORDERED GROWTH; PHOTOLUMINESCENCE MEASUREMENTS; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY;

EID: 84865589360     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.024     Document Type: Conference Paper
Times cited : (5)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.