Effect of the surface bond states in as-deposited DLC films on the incorporation of nitrogen and oxygen atoms

IEEE Transactions on Plasma Science

Volumn 40, Issue 8, 2012, Pages 2073-2078

  Nitta, Yuki ^a   Okamoto, Keishi ^a   Nakatani, Tatsuyuki ^a   Shinohara, Masanori ^b  

^a Toyo Advanced Technologies Co Ltd   (Japan)

^b NAGASAKI UNIVERSITY   (Japan)

Author keywords

Diamond like carbon (DLC); plasma surface treatment; surface structure

Indexed keywords

BONDING STATE; COATING METHODS; DIAMOND-LIKE CARBON; DLC FILM; O INCORPORATION; OXYGEN ATOM; PLASMA SURFACE TREATMENT; PLASMA TREATMENT; SURFACE BONDS;

CARBON; CARBON FILMS; PHOTOELECTRONS; PLASMA DEPOSITION; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 84865272317     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2012.2203613     Document Type: Article

References (27)

1. C. Weissmantel, K. Bewilogua, K. Breuer, D. Dietrich, U. Ebersbach, H. J. Erler, B. Rau, and G. Reisse, "Preparation and properties of hard i-C and i-BN coatings," Thin Solid Films, vol. 96, no. 1, pp. 31-44, Oct. 1982. (Pubitemid 13460722)
2. T. Nakatani, K. Okamoto, A. Araki, and T. Washimi, "Application of diamond-like carbon to a rotary engine," New Diamond Frontier Carbon Technol., vol. 16, no. 4, pp. 187-200, 2006. (Pubitemid 46160384)
3. D. P. Maguire, "Mechanical stability, corrosion performance and biore-sponse of amorphous diamond-like carbon for medical stents and guidewires," Diamond Related Mater., vol. 14, no. 8, pp. 1277-1288, Aug. 2005.
4. A. Shirakura, M. Nakaya, Y. Koga, H. Kodama, T. Hasebe, and T. Suzuki, "Diamond-like carbon films for PET bottles and medical applications," Thin Solid Films, vol. 494, no. 1/2, pp. 84-91, Jan. 2006. (Pubitemid 41659814)
5. T. Hasebe, A. Kamijo, A. Hotta, K. Takahashi, and T. Suzuki, "Application of DLC to medical devices," Chemistry Chem. Ind., vol. 59, no. 10, p. 1064, Oct. 2006.
6. R. Hauert, "An overview on the tribological behavior of diamond-like carbon in technical and medical applications," Tribol. Int., vol. 37, no. 11/12, pp. 991-1003, Nov./Dec. 2004.
7. R. Hauert, "A review of modified DLC coatings for biological applications," Diamond Relat. Mater., vol. 12, no. 3-7, pp. 583-589, Mar.-Jul. 2003. (Pubitemid 36619251)
8. M. I. Jones, I. R. McColl, D. M. Grant, K. G. Parker, and T. L. Parkar, "Protein adsorption and platelet attachment and activation, on TiN, TiC, and DLC coatings on titanium for cardiovascular applications," J. Biomed. Mater. Res., vol. 52, no. 2, pp. 413-421, Nov. 2000. (Pubitemid 30646814)
9. N. Nurdin, P. Francois, Y. Mugnier, J. Krumeich, M. Moret, B. O. Aronsson, and P. Descouts, "Haemocompatibility evaluation of DLC- and SiC-coated surfaces," Eur. Cells Mater., vol. 5, pp. 17-26, Jun. 2003.
10. M. Shinohara, K. Cho, Y. Matsuda, T. Inayoshi, H. Kawazoe, H. Fujiyama, Y. Nitta, and T. Nakatani, "Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry," J. Vac. Sci. Technol., vol. 27, no. 4, pp. 813-817, Jul. 2009.
11. M. Shinohara, H. Shibata, K. Cho, T. Nakatani, K. Okamoto, Y. Matsuda, and H. Fujiyama, Appl. Surf. Sci., vol. 253, no. 14, pp. 6242-6247, May 2007.
12. S. Takabayashi, K. Motomitsu, T. Takahagi, A. Terayama, K. Okamoto, and T. Nakatani, J. Appl. Phys., vol. 101, p. 103542, 2007.
13. T. Nakatani, K. Okamoto, I. Omura, and S. Yamashita, "Application of diamond-like-carbon coating to a coronary artery drug-eluting stent," J. Photopolym. Sci. Technol., vol. 20, no. 2, pp. 221-228, 2007.
14. T. Nakatani, K. Okamoto, I. Omura, and S. Yamashita, "Imparting super-hydrophilicity to diamond-like carbon by plasma surface treatment technique," New Diamond Frontier Carbon Technol., vol. 17, no. 6, p. 289, 2007.
15. Y. Nitta, K. Okamoto, T. Nakatani, H. Hoshi, A. Homma, E. Tatsumi, and Y. Taenaka, "Diamond-like carbon thin film with controlled zeta potential for medical material application," Diamond Relat. Mater., vol. 17, no. 11, pp. 1972-1976, Nov. 2008.
16. T. Nakatani, K. Okamoto, Y. Nitta, A. Mochizuki, H. Hoshi, and A. Homma, J. Photopolym. Sci. Technol., vol. 21, no. 2, pp. 225-230, Jan. 2008.
17. T. Nakatani and Y. Nitta, Industrial Plasma Technology, Applications from Environmental to Energy Technologies, Y. Kawai, Ed. New York: Wiley, 2010, p. 301.
18. Y. Nitta, K. Okamoto, T. Nakatani, and A. Mochizuki, "Development of novel DLC film using plasma technique for medical material," J. Photopolym. Sci. Technol., vol. 23, no. 1, p. 245, 2010.
19. S. Takabayashi, K. Okamoto, K. Motomitsu, A. Terayama, T. Nakatani, H. Sakaue, H. Suzuki, and T. Takahagi, "New method to calibrate binding energy using Au nanocolloids in x-ray photoelectron analysis of diamondlike carbon films with different electrical resistivities," Appl. Surf. Sci., vol. 254, no. 9, pp. 2666-2670, Feb. 2008. (Pubitemid 351220854)
20. S. Takabayashi, K. Okamoto, K. Shimada, K. Motomitsu, H. Motoyama, T. Nakatani, H. Sakaue, H. Suzuki, and T. Takahagi, "Chemical structural analysis of diamond-like carbon films with different electrical resistivities by x-ray photoelectron spectroscopy," Jpn. J. Appl. Phys., vol. 47, pp. 3376-3379, 2008.
21. S. Takabayashi, K. Okamoto, H. Sakaue, H. Suzuki, T. Takahagi, K. Shimada, and T. Nakatani, "Annealing effect on the chemical structure of diamond-like carbon," J. Appl. Phys., vol. 104, no. 4, p. 043512, Aug. 2008.
22. S. Takabayashi, K. Okamoto, T. Nakatani, H. Sakaue, and T. Takahagi, "Chemical structural analysis of diamond-like carbon by X-ray photoelec-tron spectroscopy," TANSO, vol. 235, p. 280, Nov. 2008.
23. S. Takabayashi, K. Okamoto, T. Nakatani, H. Sakaue, and T. Takahagi, "Surface analysis of carbon-hydrogen bonds in diamond-like carbon films by x-ray photoelectron spectroscopy," Jpn. J. Appl. Phys., vol. 48, no. 9, p. 092304, Sep. 2009.
24. T. Nakatani, Y. Nitta, K. Okamoto, and A. Mochizuki, "Surface engineering of DLC thin films with controlled zeta potential using plasma processing and evaluation of cytocompatibility," J. Photopolym. Sci. Technol., vol. 22, no. 4, pp. 455-460, Jan. 2009.
25. M. Shinohara, H. Kawazoe, T. Inayoshi, T. Kawakami, Y. Matsuda, H. Fujiyama, Y. Nitta, and T. Nakatani, "Difference of deposition process of an amorphous carbon film due to source gases," Thin Solid Films, vol. 518, no. 13, pp. 3497-3501, Apr. 2010.
26. K. Kimura, K. Nakajima, and H. Imura, "Hydrogen depth profiling with sub-nm resolution in high-resolution ERD," Nucl. Instrum. Methods Phys. Res. B, vol. 140, no. 3-4, p. 397, May 1998.
27. J. McMurry and E. Simanek, Fundamentals of Organic Chemistry, 6th ed. Belmont, CA: Thomson Brooks-Cole, 2006.