Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application

Materials Research Society Symposium Proceedings

Volumn 1415, Issue , 2012, Pages 59-64

  Yagyu, Hiromasa ^a   Hirai, Yoshikazu ^b   Uesugi, Akio ^b   Makino, Yoshihide ^b   Sugano, Koji ^b   Tsuchiya, Toshiyuki ^b   Tabata, Osamu ^b  

^a Limited   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAD-SPRING MODELS; BENDING POTENTIAL; CHEMICALLY AMPLIFIED RESIST; COARSE-GRAINED MOLECULAR DYNAMICS; COARSE-GRAINED MOLECULAR DYNAMICS SIMULATIONS; MEMS APPLICATIONS; MOLECULAR DYNAMICS CALCULATION; NANOINDENTATION TESTS; SIMULATION METHODS; UNIAXIAL ELONGATION;

BENDING TESTS; MECHANICAL PROPERTIES; MOLECULAR DYNAMICS; MOLECULAR MECHANICS;

COMPUTER SIMULATION;

EID: 84865042578     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2012.198     Document Type: Conference Paper

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