Charge injection and storage in single-layer and multilayer inorganic electrets based on SiO 2 and Si 3N 4

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 19, Issue 4, 2012, Pages 1253-1260

  Leonov, Vladimir ^a   Van Hoof, Chris ^a   Goedbloed, Martijn ^b   Van Schaijk, Rob ^b  

^a IMEC   (Belgium)

^b HOLST CENTRE   (Netherlands)

Author keywords

Electret; inorganic electret; silicon nitride; silicon oxide

Indexed keywords

CHARGE RETENTION; DIELECTRIC LAYER; ELEVATED TEMPERATURE; MEAN DISTANCES; SINGLE LAYER; TRAP DENSITY;

MULTILAYERS; SILICON NITRIDE; SILICON OXIDES;

ELECTRETS;

EID: 84865035373     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2012.6259999     Document Type: Article

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