Electret patterning technologies for microsystems

Smart Systems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components

Volumn , Issue , 2010, Pages

  Leonov, Vladimir ^a   Van Hoof, Chris ^a   Altena, Geert ^b   Goedbloed, Martijn ^b   Van Schaijk, Rob ^b  

^a IMEC   (Belgium)

^b HOLST CENTRE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84907406565     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. T. Genda, S. Tanaka, and M. Essashi, "High power electrostatic motor with micropatterned electret on shrouded turbine, " in Proc. 13th Int. Conf. Solid-State Sensors, Actuators and Microsys. (Transducers), Seoul, Korea, June 5-9, 2005, Vol. 1, pp. 709-712.
3. V. Leonov, P. Fiorini, and C. Van Hoof, "Stabilization of positive charge in SiO2/Si3N4 electrets", IEEE Trans. Dielectr. Electr. Insul. , Vol. 13, pp. 1049-1056, 2006.
4. V. Leonov, P. Fiorini, and C. Van Hoof, "Rapid corona charging and stability of positive charge stored in SiO2/Si3N4 electrets, " in Proc. 12th Int. Symp. Electrets (ISE-12), Salvador, Brazil, Sept. 11-14, 2005, pp. 352-255.
5. D. Frohman-Bentchkowsky and M. Lenzlinger, "Charge transport and storage in metalnitride-oxide-silicon (MNOS) structures, " J. Appl. Phys. , Vol. 40, pp. 3307-3319, 1969.
6. "Electrets, " G. M. Sessler, Ed. , Topics in Appl. Phys. , Vol. 33, Berlin: Springer-Verlag, 1980.
7. E. Halvorsen, E. R. Westby, S. Husa, et al. , "An electrostatic energy harvester with electret bias, " in Proc. 15th Transducers, Denver, CO, June 21-25, 2009, pp. 1381-1384.