Stabilization of positive charge in SiO2/Si3N 4 electrets

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 13, Issue 5, 2006, Pages 1049-1056

  Leonov, V ^a   Fiorini, P ^a   Van Hoof, C ^a  

^a IMEC   (Belgium)

Author keywords

Electret lifetime; Electrets; Heat treatment; Inorganic electret films; Silicon dioxide; Silicon nitride

Indexed keywords

ELECTRIC CHARGE; HEAT TREATMENT; SILICA; SILICON NITRIDE; THERMAL EFFECTS;

CHARGED ELECTRETS; ELECTRET LIFETIME; INORGANIC ELECTRET FILMS;

ELECTRETS;

EID: 33750816542     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2006.247831     Document Type: Conference Paper

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