Integration of a nonmetallic electrostatic precipitator and a wet scrubber for improved removal of particles and corrosive gas cleaning in semiconductor manufacturing industries

Journal of the Air and Waste Management Association

Volumn 62, Issue 8, 2012, Pages 905-915

  Kim, Hak Joon ^a   Han, Bangwoo ^a   Kim, Yong Jin ^a   Yoa, Seok Jun ^b   Oda, Tetsuji ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b Pukyong National University   (South Korea)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ALUMINUM CHLORIDE; BRUSH CONDUCTORS; CARBON FIBER REINFORCED PLASTICS; CHLORINE COMPOUNDS; CORROSION PROTECTION; EFFICIENCY; ELECTRIC GROUNDING; ELECTROSTATIC PRECIPITATORS; ELECTROSTATICS; EXHAUST GASES; IONIZATION OF GASES; POLYVINYL CHLORIDES; POTASSIUM COMPOUNDS; SCRUBBERS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SUBMERSIBLE PUMPS;

CARBON FIBER REINFORCED POLYMER; COLLECTION EFFICIENCY; COLLECTION PERFORMANCE; ELECTROSTATIC PRECIPITATORS (ESP); REGENERATION PERFORMANCE; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING INDUSTRY;

PRECIPITATION (CHEMICAL);

POLYMER; POLYVINYLCHLORIDE; SILICON DIOXIDE;

ARTICLE; ELECTRIC POTENTIAL; ELECTRICAL EQUIPMENT; ELECTRODE; ELECTRONICS INDUSTRY; ELECTROSTATIC PRECIPITATOR; EXHAUST GAS; FLOW RATE; IONIZATION; ISOLATION PROCEDURE; PRIORITY JOURNAL; SEMICONDUCTOR; WET SCRUBBER;

EID: 84864807731     PISSN: 10962247     EISSN: 21622906     Source Type: Journal    
DOI: 10.1080/10962247.2012.686893     Document Type: Article

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