Emission factors of air toxics from semiconductor manufacturing in Korea

Journal of the Air and Waste Management Association

Volumn 56, Issue 11, 2006, Pages 1518-1524

  Eom, Yun Sung ^a   Hong, Ji Hyung ^a   Lee, Suk Jo ^a   Lee, Eun Jung ^a   Cha, Jun Seok ^a   Lee, Dae Gyun ^a   Bang, Sun Ae ^a  

^a National Institute of Biological Resources   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION; AIR POLLUTION CONTROL; AIR QUALITY; HAZARDOUS MATERIALS; HEAVY METALS; PARTICULATE EMISSIONS;

AIR TOXIC; GASEOUS OPERATIONS; SEMICONDUCTOR MANUFACTURING INDUSTRY; SEMICONDUCTOR PACKAGING;

TOXIC MATERIALS;

FLUORINE DERIVATIVE; HEAVY METAL; HYDROCHLORIC ACID; VOLATILE ORGANIC COMPOUND;

ACCURACY; ACID BASE BALANCE; AIR POLLUTION CONTROL; ARTICLE; KOREA; MATERIAL COATING; PHOTOLITHOGRAPHY; PRIORITY JOURNAL; PROCESS DESIGN; RELIABILITY; SEMICONDUCTOR; TAIWAN;

EID: 33846043545     PISSN: 10962247     EISSN: 21622906     Source Type: Journal    
DOI: 10.1080/10473289.2006.10464556     Document Type: Article

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