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Volumn 24, Issue 31, 2012, Pages 4278-4283

Controlled orientation of block copolymers on defect-free faceted surfaces

Author keywords

block copolymers; faceted substrates; GISAXS; gratings; long range lateral ordering

Indexed keywords

CONTROLLED ORIENTATION; DEFECT-FREE; FACETED SURFACES; GI-SAXS; LATERAL ORDERING; LINE PATTERN; MICRO-DOMAINS;

EID: 84864660438     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201201279     Document Type: Article
Times cited : (35)

References (30)
  • 3
    • 0004245602 scopus 로고    scopus 로고
    • Semiconductor industry association 2005 edition (semiconductor industry association, San Hose, CA
    • Semiconductor industry association, International Technology Roadmap for Semiconductor, 2005 edition (semiconductor industry association, San Hose, CA, 2005.
    • (2005) International Technology Roadmap for Semiconductor
  • 6
    • 84864673762 scopus 로고    scopus 로고
    • US5772905
    • S. Y. Chou, US5772905, 1998.
    • (1998)
    • Chou, S.Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.